Magnesiothermic reduction of silica glass substrate—Chemical states of silicon in the generated layers

Journal of Asian Ceramic Societies - Tập 5 - Trang 341-349 - 2017
Yuki Tsuboi1, Shogo Ura2, Katsumi Takahiro3, Takashi Henmi1, Arifumi Okada3, Takashi Wakasugi3, Kohei Kadono3
1Graduate School of Science and Technology, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
2Faculty of Electronics, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
3Faculty of Materials Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan

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