MEMS electrostatic micropower generator for low frequency operation

Sensors and Actuators A: Physical - Tập 115 Số 2-3 - Trang 523-529 - 2004
Paul D. Mitcheson1, Peng Miao1, Bernard H. Stark1, Eric M. Yeatman1, Andrew S. Holmes1, T.C. Green1
1Dept. of Electrical and Electronic Engineering, Imperial College London, London, UK

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