Luminescence confocal microscopy of 3D components of photonic integrated circuits fabricated by two-photon photopolymerization

Rilond P. Matital1, Danila A. Kolymagin1, Dmytro A. Chubich1, Denis D. Merkushev1, Alexei G. Vitukhnovsky1,2
1Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, Dolgoprudny, Moscow Region 141700, Russian Federation
2Lebedev Physical Institute, Russian Academy of Sciences, Leninskii Prospect 53, Moscow 119991, Russian Federation

Tài liệu tham khảo

Miller, 1969, Integrated optics – an introduction, Bell Syst. Tech. J., 48, 2059, 10.1002/j.1538-7305.1969.tb01165.x van der Tol, 2018, Indium phosphide integrated photonics in membranes, IEEE J. Sel. Top. Quant. Electron., 24, 10.1109/JSTQE.2017.2772786 He, 2019, Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits, Opt. Lett., 44, 2314, 10.1364/OL.44.002314 Shang, 2015, Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits, Opt Express, 23, 21334, 10.1364/OE.23.021334 Bogaerts, 2004, Basic structures for photonic integrated circuits in Silicon-on-insulator, Opt Express, 12, 1583, 10.1364/OPEX.12.001583 Chen, 1993, Polymer-based photonic integrated circuits, Opt Laser. Technol., 25, 347, 10.1016/0030-3992(93)90001-V Welch, 2006, The realization of large-scale photonic integrated circuits and the associated impact on fiber-optic communication systems, J. Lightwave Technol., 24, 4674, 10.1109/JLT.2006.885769 Augustin, 2018, InP-based generic foundry platform for photonic integrated circuits, IEEE J. Sel. Top. Quant. Electron., 24, 1, 10.1109/JSTQE.2017.2720967 Weimann, 2017, Silicon photonic integrated circuit for fast and precise dual-comb distance metrology, Opt Express, 25, 30091, 10.1364/OE.25.030091 Akca, 2013, Miniature spectrometer and beam splitter for an optical coherence tomography on a silicon chip, Opt Express, 21, 16648, 10.1364/OE.21.016648 Wang, 2015, Silicon photonic integrated circuit swept-source optical coherence tomography receiver with dual polarization, dual balanced, in-phase and quadrature detection, Biomed. Opt Express, 6, 2562, 10.1364/BOE.6.002562 Muñoz, 2017, Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications, Sensors, 17, 2088, 10.3390/s17092088 Subramanian, 2015, Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited], Photon. Res., 3, B47, 10.1364/PRJ.3.000B47 Rahim, 2017, Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits, J. Lightwave Technol., 35, 639, 10.1109/JLT.2016.2617624 Ma, 2002, Polymer-based optical waveguides: materials, processing, and devices, Adv. Mater., 14, 1339, 10.1002/1521-4095(20021002)14:19<1339::AID-ADMA1339>3.0.CO;2-O Lindenmann, 2012, Photonic wire bonding: a novel concept for chip-scale interconnects, Opt Express, 20, 17667, 10.1364/OE.20.017667 Maruo, 1997, Three-dimensional microfabrication with two-photon-absorb photopolymerization, Opt Lett., 22, 2, 10.1364/OL.22.000132 Žukauskas, 2010, Organic dye doped microstructures for optically active functional devices fabricated via two-photon polymerization technique, Lith. J. Phys., 50, 55, 10.3952/lithjphys.50112 Rekštytė, 2014, Direct laser fabrication of composite material 3D microstructured scaffolds, J. Laser Micro. Nanoeng., 9, 25, 10.2961/jlmn.2014.01.0006 Zvagelsky, 2020, Three-dimensional polymer wire bonds on a chip: morphology and functionality, J. Phys. Appl. Phys., 53, 355102, 10.1088/1361-6463/ab8e7f Žukauskas, 2015, Tuning the refractive index in 3D direct laser writing lithography: towards GRIN microoptics, Laser Photon. Rev., 9, 706, 10.1002/lpor.201500170 Schmid, 2019, Optical properties of photoresists for femtosecond 3D printing: refractive index, extinction, luminescence-dose dependence, aging, heat treatment and comparison between 1-photon and 2-photon exposure, Opt. Mater. Express, 9, 4564, 10.1364/OME.9.004564 Pfeifle, 2014, Coherent terabit communications with microresonator Kerr frequency combs, Nat. Photonics, 8, 375, 10.1038/nphoton.2014.57 Gu, 2015, Optical transmission between III-V chips on Si using photonic wire bonding, Opt Express, 23, 22394, 10.1364/OE.23.022394 Merklein, 2016, Widely tunable, low phase noise microwave source based on a photonic chip, Opt Lett., 41, 4633, 10.1364/OL.41.004633 Mayer, 2017, 3D fluorescence-based security features by 3D laser lithography, Adv. Mater. Technol., 2, 1700212, 10.1002/admt.201700212 Kabzinski, 2016, Method for optical analysis of surface structure of lead-acid battery electrodes using a confocal laser scanning microscope, J. Electrochem. Soc., 163, A995, 10.1149/2.0861606jes