Low-Temperature Reactions between Vaporizing Silicon and Carbon

А. И. Харламов1, Н. В. Кириллова2, Л. А. Карачевцева3, Ganna Kharlamova2
1I. N. Frantsevich Institute of Problems in Materials Science, National Academy of Sciences of Ukraine, Kyiv, Ukraine
2Taras Shevchenko Kyiv National University, Kyiv, Ukraine
3V. E. Lashkarev Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Kyiv, Ukraine

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