Lithographic fabrication and spectroscopic characterization of a THz metamaterial absorber

Vietnam Journal of Science and Technology - Tập 59 Số 1 - Trang 40-46 - 2022
Nguyen Thanh Tung1, Le Hong Phuc2
1School of Chemical Engineering, Hanoi University of Science and Technology, No 1, Dai Co Viet, Hai Ba Trung, Ha Noi, Viet Nam
2Institute of Materials Science, Vietnam Academy of Science and Technology (VAST),18 Hoang Quoc Viet, Ha Noi, Viet Nam

Tóm tắt

THz metamaterial absorbers are often studied by computational techniques, where the influence of actual material parameters and fabricating limitation has not been completely understood. Here we present an experimental investigation on a far-infrared metamaterial absorber composed of a gold disk-shaped resonator, a silicon oxide spacer, and a gold film. The samples are fabricated using the UV laser lithography technique in combination with the electron-beam evaporation. The absorption feature of fabricated samples is examined by Fourier-transformed infrared spectroscopy and supported by finite integration simulations. 

Từ khóa

#perfect absorbers #metamaterials #infrared spectroscopy

Tài liệu tham khảo

V. G. Veselago, Sov. Phys. Usp. 10, 509 (1968).

J. B. Pendry, Phys. World 13, 27 (2000).

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, Phys. Rev. B 78, 241103 (2008).

Y. Zhang, Y. Feng, B. Zhu, J. Zhao, and T. Jiang, Opt. Express 22, 22743 (2014).

C. M. Watts, X. Liu, and W. J. Padilla, Adv. Mat. 24, OP98 (2012).

D. T. Viet, N . T. Hien, P. V. Tuong, N. Q. Minh, P. T. Trang, L. N. Le, Y. P. Lee, and V. D. Lam, Opt. Comm. 322, 209 (2014).

A. Ishikawa and T. Tanaka, Sci. Rep. 5, 12570 (2015).

C. Y. Tsai, S. P. Lu, J. W. Lin, and P. T. Lee, Appl. Phys. Lett. 98, 153108 (2011).

C. W. Cheng, M. N. Abbas, C. W. Chiu, K. T. Lai, M. H. Shih, and Y. C. Chang, Opt. Express 20, 10376 (2012).

S. Guddala, R. Kumar, and S. A. Ramakrishna, Appl. Phys. Lett. 106, 111901 (2015).

A. D. Khan, M. Amin, A. Ali, S. D. Khan, and R. U. Khan, Appl. Phys. A 120, 641 (2015).

Q. Wang, W. Han, P. Liu, and L. Dong, J. Lightwave Tech. 34, 2175 (2016).

P. Jahangiri, F. B. Zarrabi, M. N. Moghadasi, A. S. Arezoomand, and S. Heydari, Opt. Comm. 394, 80 (2017).

www.cst.com

C. Z. Tan, J. Non-Crys. Solids 223, 158 (1998).

X. K. Bui, S. T. Bui, N. T. Tung, N. T. Hien, Y. J. Kim, L. Y. Chen, Y. P. Lee, T. L. Pham, V. D. Lam, J. Phys. D: Appl. Phys. 53, 105502 (2020).

U. T. D. Thuy, N. T. Thuy, N. T. Tung, E. Janssens, and N. Q. Liem, APL Materials 7, 071102 (2019).

J. Zhou, E. N. Economon, T. Koschny, and C. M. Soukoulis, Opt. Lett. 31, 3620 (2006).