Light-induced metastability of ‘stable’ a-Si:H deposited from silane-dichlorosilane mixtures — comprehensive characterization

Journal of Non-Crystalline Solids - Tập 198 - Trang 415-418 - 1996
Nobuhiro Hata1, Ian S. Osborne1, Toru Ikeda1, Rudolf Durny2, Akihisa Matsuda1
1Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305, Japan
2JRCAT-NAIR, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan

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