Les différentes voies de modélisation macroscopique du procédé de dépôt de SiC par voie gazeuse

Annales de Chimie Science des Matériaux - Tập 23 - Trang 753-789 - 1998
J. Aubreton1, E. Blanquet2, M.F. Elchinger1, M. Pons2
1Laboratoire de Matériaux Céramiques et Traitements de Surface, 123 avenue Albert-Thomas, 87060 Limoges cedex, France
2Laboratoire de Thermodynamique et Physicochimie Metallurgiques, UMR CNRS/INPG/UJF 5614, Institut National Polytechnique de Grenoble, BP 75, 38402 Saint Martin d'Hères, France

Tài liệu tham khảo

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