Laser assisted particle removal ‘dry’ cleaning of critical surfaces

Materials Science and Engineering B: Solid-State Materials for Advanced Technology - Tập 49 - Trang 85-88 - 1997
S.D. Allen1, A.S. Miller2, S.J. Lee3
1217 Westcott Building, Florida State University, Tallahassee, FL 32306-1330, USA
2XonTech Inc., 6862 Hayvenhurst Ave., Van Nuys, CA 91406, USA
3Department of Mathematics and Science Education, National Pingtung Teachers College, 1 Lin-Sen Road, Pingtung, Taiwan

Tài liệu tham khảo

Imen, 1991, Appl. Phys. Lett., 58, 203, 10.1063/1.104923 K. Imen, S.J. Lee and S.D. Allen U.S. Patent 429,026 (1991) Zapka, 1991, Appl. Phys. Lett., 58, 2217, 10.1063/1.104931 Lee, 1992, Appl. Phys. Left., 61, 2314, 10.1063/1.108228
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Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Tập 49

85-88

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