Ion sources and implantation systems

1983 1985, 6 Goktepe, 1985, 69, 13 Brimhall, 1984, Vol. 27, 163 Holmes, 1979, 44, 47 Muller, 1985, 6, 394 Yuchum, 1985, 6, 447 Bell, 1984, Bull. Am. Phys. Soc., 29, 1369 Newman, 1976, 139, 87 Bernas, 1961, 300 Chavet, 1967, Nucl. Instrum. Methods, 51, 77, 10.1016/0029-554X(67)90365-5 J. Camplan, personal communication, 1974. Lempert, 1976, 139, 57 Meunier, 1976, 139, 101 Freeman, 1963, Nucl. Instrum. Methods, 22, 306, 10.1016/0029-554X(63)90257-X Aiken, 1976, 139, 125 Williams, 1978, 38, 70 Aiken, 1979, 44, 159 Guerra, 1985, 6, 63 Yabe, 1985, 6, 119 Limpaecher, 1973, Rev. Sci. Instrum., 44, 726, 10.1063/1.1686231 Stirling, 1979, Rev. Sci. Instrum., 50, 102, 10.1063/1.1135651 Ehlers, 1979, Rev. Sci. Instrum., 50, 1353, 10.1063/1.1135725 Goede, 1980, J. Appl. Phys., 51, 1896, 10.1063/1.327900 Martin, 1984, 34, 17 Crecelius, 1985, IEEE Trans. Nucl. Sci., 32, 1785, 10.1109/TNS.1985.4333723 van Bommel, 1984, 34, 25 Keller, 1984, 34, 31 Ehlers, 1982, Rev. Sci. Instrum., 53, 1429, 10.1063/1.1137190 Kaufman, 1975 Keller, 1983, 97 Cope, 1984, J. Appl. Phys., 56, 96, 10.1063/1.333735 Brainard, 1983, Rev. Sci. Instrum., 54, 1497, 10.1063/1.1137275 Nicholson, 1983, Introduction to Plasma Theory, 200 Kaufman, 1978, NASA Contract, Rep. CR 159527 Kaufman, 1977, NASA Contract. Rep. CR 135226 Kaufman, 1976 Alessi, 1985, 131, 18 Scaife, 1985, 6, 39 Shubaly, 1983, IEEE Trans. Nucl. Sci., 30, 1399, 10.1109/TNS.1983.4332542 Schubaly, 1985, IEEE Trans. Nucl. Sci., 32, 1751, 10.1109/TNS.1985.4333711 Bickes, 1982, Rev. Sci. Instrum., 53, 585, 10.1063/1.1137028 Ghanbari, 1985, Nucl. Instrum. Methods B, 10, 767, 10.1016/0168-583X(85)90103-X Stirling, 1977, Rev. Sci. Instrum., 48, 533, 10.1063/1.1135062 menon, 1985, Rev. Sci. Instrum., 56, 242, 10.1063/1.1138338 Shubaly, 1981, IEEE Trans. Nucl. Sci., 28, 1316, 10.1109/TNS.1981.4331405 Tonegawa, 1985, 6, 129 Sakudo, 1978, Rev. Sci. Instrum., 49, 940, 10.1063/1.1135499 Sakudo, 1984, 34, 245 Prewett, 1985, 6, 135 Adler, 1985, 6, 123 Whealton, 1978, Appl. Phys. Lett., 33, 278, 10.1063/1.90364 J. W. Robinson and J. H. Keller, unpublished work, 1985. Whealton, 1979, J. Appl. Phys., 50, 3964, 10.1063/1.326472 Meixner, 1981, J. Appl. Phys., 52, 1167, 10.1063/1.329732 Whealton, 1982, J. Appl. Phys., 53, 2811, 10.1063/1.331084 Holmes, 1981, J. Phys. E, 14, 856, 10.1088/0022-3735/14/7/018 Shubaly, 1981, IEEE Trans. Nucl. Sci., 28, 2655, 10.1109/TNS.1981.4331787 Piosczyk, 1984, Rev. Sci. Instrum., 55, 1421, 10.1063/1.1137952 Keller, 1981, Beam optics design for ion implantation, Nucl. Instrum. Methods, Part II, 189, 7, 10.1016/0029-554X(81)90123-3 Hanley, 1983, 2 Rathmell, 1985, 6, 56 Klein, 1983, IEEE Trans. Nucl. Sci., 30, 3313, 10.1109/TNS.1983.4336644