Ion-beam-induced epitaxial crystallization and amorphization in silicon

Mayer, 1970 Dearnaley, 1973, Vol. 8 Poate, 1984 Mayer, 1968, Can. J. Phys., 45, 663, 10.1139/p68-082 Donovan, 1985, J. Appl. Phys., 57, 1795, 10.1063/1.334406 Roorda, 1989, Phys. Rev. Letters, 62, 1880, 10.1103/PhysRevLett.62.1880 Donovan, 1989, Appl. Phys. Letters, 55, 1516, 10.1063/1.101593 Csepregi, 1975, Phys. Letters A, 54, 157, 10.1016/0375-9601(75)90847-6 Williams, 1983, 133 Olson, 1988, Mater. Sci. Rept., 3, 1, 10.1016/S0920-2307(88)80005-7 Westmoreland, 1970, Radiation Effects, 6, 161, 10.1080/00337577008236293 Bøgh, 1971, Radiation Effects, 7, 115, 10.1080/00337577108232571 Hirvonen, 1971, 8 Gerasimenko, 1972, Fiz. Tekh. Poluprovodn., 6, 1834 Gerasimenko, 1973, Soviet Phys. Semicond., 6, 1588 Roosendaal, 1978, Radiation Effects, 36, 35, 10.1080/00337577808233168 Kool, 1978, Radiation Effects, 36, 41, 10.1080/00337577808233169 Cannavò, 1986, 51, 329 Narayan, 1984, Mater. Letters, 2, 211, 10.1016/0167-577X(84)90026-0 Gerasimenko, 1974, Soviet Phys. Semicond., 7, 1461 Kachurin, 1980, Fiz. Tekh. Poluprovodn., 14, 787 Kachurin, 1980, Soviet Phys. Semicond., 14, 461 Nakata, 1981, Japan. J. Appl. Phys., 20, 2211, 10.1143/JJAP.20.2211 Cembali, 1982, Appl. Phys. Letters, 40, 62, 10.1063/1.92925 Holland, 1984, Appl. Phys. Letters, 44, 758, 10.1063/1.94907 Holland, 1984, 27, 235 Dietrich, 1984, 27, 241 Holland, 1985, Nucl. Instr. Methods B, 7/8, 243, 10.1016/0168-583X(85)90561-0 Gabilli, 1985, Japan. J. Appl. Phys., 24, L14, 10.1143/JJAP.24.L14 Cannavò, 1986, J. Appl. Phys., 59, 4036, 10.1063/1.337038 Berti, 1986, Phys. Stat. Sol., 94a, 95, 10.1002/pssa.2210940110 Berti, 1986, Phys. Stat. Sol., 97a, 77, 10.1002/pssa.2210970105 Galloni, 1987, Nucl. Instr. Methods B, 19/20, 466, 10.1016/S0168-583X(87)80092-7 Berti, 1987, Nucl. Instr. Methods B, 19/20, 475, 10.1016/S0168-583X(87)80094-0 Komarov, 1987, Radiation Effects, 105, 79, 10.1080/00337578708210064 Berti, 1989, 128, 569 Rubio, 1989, Mater. Res. Soc. Symp. Proc., 128, 575, 10.1557/PROC-128-575 Nakata, 1982, Japan. J. Appl. Phys., 21, 211, 10.1143/JJAP.21.211 Nakata, 1982, Appl. Phys. Letters, 40, 686, 10.1063/1.93235 Cannavò, 1985, Appl. Phys. Letters, 47, 138, 10.1063/1.96240 Skorupa, 1987, Phys. Stat. Sol., 101a, k101, 10.1002/pssa.2211010243 Holmén, 1975, Radiation Effects, 24, 45, 10.1080/00337577508239476 Holmén, 1975, Radiation Effects, 24, 51, 10.1080/00337577508239477 Golecki, 1979, Phys. Letters A, 71, 267, 10.1016/0375-9601(79)90183-X Olson, 1980, Appl. Phys. Letters, 37, 1019, 10.1063/1.91749 Olson, 1983, 13, 141 Priolo, 1988, J. Mater. Res., 3, 1212, 10.1557/JMR.1988.1212 Priolo, 1988, Appl. Phys. Letters, 53, 2605, 10.1063/1.100538 Priolo, 1989, Appl. Surface Sci., 43, 178, 10.1016/0169-4332(89)90208-0 Priolo, 1989, Helv. Phys. Acta, 62, 730 Park, 1988, J. Mater. Res., 3, 298, 10.1557/JMR.1988.0298 Biersack, 1980, Nucl. Instr. Methods, 174, 257, 10.1016/0029-554X(80)90440-1 Svensson, 1983, Nucl. Instr. Methods, 209/210, 755, 10.1016/0167-5087(83)90879-7 Holmén, 1984, Appl. Phys. Letters, 46, 1116, 10.1063/1.95037 Linnros, 1984, Phys. Rev. B, 30, 3629, 10.1103/PhysRevB.30.3629 Linnros, 1985, Phys. Rev. B, 32, 2770, 10.1103/PhysRevB.32.2770 Linnros, 1985 Elliman, 1985, Nucl. Instr. Methods B, 7/8, 310, 10.1016/0168-583X(85)90571-3 Short, 1984, 27, 247 Williams, 1985, 37, 127 Williams, 1985, Phys. Rev. Letters, 55, 1482, 10.1103/PhysRevLett.55.1482 Williams, 1985, 45, 79 Elliman, 1986, 51, 319 Elliman, 1987, Nucl. Instr. Methods B, 19/20, 435, 10.1016/S0168-583X(87)80086-1 Priolo, 1989 Custer, 1990 Miyao, 1986, Appl. Phys. Letters, 48, 1132, 10.1063/1.96447 Miyao, 1985, 181 Lulli, 1987, 38, 8038 Lulli, 1988, 100, 375 Lulli, 1986, Vol. 2, 985 Matthews, 1973, Phil. Mag., 27, 1313, 10.1080/14786437308226889 Washburn, 1983, Nucl. Instr. Methods, 209/210, 345, 10.1016/0167-5087(83)90821-9 Linnros, 1986, Appl. Phys. Letters, 59, 1513 La Ferla, 1987, Nucl. Instr. Methods B, 19/20, 470, 10.1016/S0168-583X(87)80093-9 La Ferla, 1987, 325 Maher, 1987, 93, 87 Csepregi, 1978, J. Appl. Phys., 49, 3906, 10.1063/1.325397 Spaepen, 1982, 15 Van Vechten, 1974, Phys. Rev. B, 10, 1482, 10.1103/PhysRevB.10.1482 Lu, 1989, Appl. Phys. Letters, 54, 2583, 10.1063/1.101056 Lu, 1990, Appl. Phys. Letters, 56, 317 Jackson, 1988, J. Mater. Res., 3, 1218, 10.1557/JMR.1988.1218 Csepregi, 1977, J. Appl. Phys., 48, 4234, 10.1063/1.323408 Kennedy, 1977, J. Appl. Phys., 48, 4241, 10.1063/1.323409 Cullis, 1978, J. Appl. Phys., 49, 5188, 10.1063/1.324414 Revesz, 1978, J. Appl. Phys., 49, 5199, 10.1063/1.324415 Wittmer, 1978, J. Appl. Phys., 49, 5207, 10.1063/1.324416 Suni, 1982, Appl. Phys. Letters, 40, 269, 10.1063/1.93034 Suni, 1982, Thin Solid Films, 93, 171, 10.1016/0040-6090(82)90102-X Lietoila, 1982, J. Appl. Phys., 53, 4399, 10.1063/1.331222 Mosley, 1984, Appl. Phys. Letters, 45, 86, 10.1063/1.94979 Williams, 1983, Phys. Rev. Letters, 51, 1069, 10.1103/PhysRevLett.51.1069 Pfann, 1958 Chalmers, 1964 Brice, 1965 Poate, 1982 Wood, 1984 Poate, 1982 1983 1986 Jacobson, 1986, Appl. Phys. Letters, 48, 118, 10.1063/1.96970 Jacobson, 1987, 74, 327 Jacobson, 1988 Poate, 1987, Nucl. Instr. Methods B, 19/20, 480, 10.1016/S0168-583X(87)80095-2 Elliman, 1987, Appl. Phys. Letters, 61, 314, 10.1063/1.98454 Poate, 1988, Phys. Rev. Letters, 60, 1322, 10.1103/PhysRevLett.60.1322 Priolo, 1988, Appl. Phys. Letters, 52, 1043, 10.1063/1.99204 Poate, 1988, 100, 399 Poate, 1989, Nucl. Instr. Methods B, 37/38, 955, 10.1016/0168-583X(89)90333-9 Poate, 1989, 128, 533 Custer, 1989, 128, 545 Trumbore, 1960, Bell System Tech. J, 39, 205, 10.1002/j.1538-7305.1960.tb03928.x Priolo, 1988, Appl. Phys. Letters, 52, 1213, 10.1063/1.99161 Priolo, 1989, Nucl. Instr. Methods B, 39, 343, 10.1016/0168-583X(89)90799-4 Priolo, 1988, Appl. Phys. Letters, 53, 2486, 10.1063/1.100221 Bruson, 1982, J. Appl. Phys., 53, 3616, 10.1063/1.331141 Withrow, 1989, Appl. Surface Sci., 43, 191, 10.1016/0169-4332(89)90210-9 Williams, 1981, Nucl. Instr. Methods, 182, 389, 10.1016/0029-554X(81)90712-6 Williams, 1982, Appl. Phys. Letters, 40, 266, 10.1063/1.92893 Elliman, 1983, Nucl. Instr. Methods, 210, 663, 10.1016/0167-5087(83)90864-5 Narayan, 1983, J. Vacuum Sci. Technol. B, 1, 871, 10.1116/1.582708 Nygren, 1987, 74, 307 Nygren, 1988, Appl. Phys. Letters, 52, 439, 10.1063/1.99436 Pennycook, 1988, 100, 441 Park, 1988, Appl. Phys. Letters, 52, 1517, 10.1063/1.99117 La Ferla, 1989, Nucl. Instr. Methods B, 39, 311, 10.1016/0168-583X(89)90794-5 Priolo, 1989, Appl. Surface Sci., 41/42, 619, 10.1016/0169-4332(89)90132-3 Priolo, 1990, Phys. Rev. B, 41, 5235, 10.1103/PhysRevB.41.5235 Olson, 1984, 23, 375 Williams, 1980, Appl. Phys. Letters, 37, 829, 10.1063/1.92096 Priolo, 1990, Appl. Phys. Letters, 56, 24, 10.1063/1.102635 Alestig, 1987, J. Appl. Phys., 62, 409, 10.1063/1.339812 Harith, 1988, Semicond. Sci. Technol., 3, 641, 10.1088/0268-1242/3/7/003 Priolo, 1989, 128, 563 Spinella, 1989, Nuovo Cimento, 11, 1805, 10.1007/BF02459123 Leiberich, 1987, Nucl. Instr. Methods B, 19/20, 457, 10.1016/S0168-583X(87)80090-3 Linnros, 1987, J. Appl. Phys., 62, 4737, 10.1063/1.339027 Linnros, 1987, 74, 477 Brown, 1987, 61 Elliman, 1987, 74, 471 Linnros, 1988, J. Mater. Res., 3, 1208, 10.1557/JMR.1988.1208 Linnros, 1988, 100, 369 Vook, 1969, Radiation Effects, 2, 23, 10.1080/00337576908235576 Atwater, 1988, Phys. Rev. Letters, 60, 112, 10.1103/PhysRevLett.60.112 Atwater, 1988, 100, 345 Heera, 1989, Phys. Stat. Sol., 114a, 599, 10.1002/pssa.2211140222 von Allmen, 1979, Appl. Phys. Letters, 35, 280, 10.1063/1.91071 Roth, 1977, Appl. Phys. Letters, 31, 689, 10.1063/1.89506 Bean, 1980, Appl. Phys. Letters, 36, 59, 10.1063/1.91316 Foti, 1980, Appl. Phys. Letters, 36, 840, 10.1063/1.91356 Kumii, 1982, Japan. J. Appl. Phys., 21, 1431, 10.1143/JJAP.21.1431 Burns, 1988, Appl. Phys. Letters, 53, 1423, 10.1063/1.99961 La Ferla, 1988, Appl. Phys. Letters, 52, 712, 10.1063/1.99355 La Ferla, 1988, 100, 381 Skorupa, 1988, Electron. Letters, 24, 875, 10.1049/el:19880596 Priolo, 1989, 100 Yu, 1989, Appl. Phys. Letters, 54, 2342, 10.1063/1.101523 Yu, 1989 Voelskow, 1989, Appl. Surface Sci., 43, 106, 10.1016/0169-4332(89)90211-0 Elliman, 1989, Appl. Phys. Letters, 55, 843, 10.1063/1.102264 Elliman, 1990, 157, 105 Ridgway, 1990, Nucl. Instr. Methods B, 48, 453, 10.1016/0168-583X(90)90159-R Ridgway, 1990, Appl. Phys. Letters, 56, 2117, 10.1063/1.102989 Myers, 1980, Nucl. Instr. Methods, 168, 265, 10.1016/0029-554X(80)91264-1 Matteson, 1979, Radiation Effects, 42, 217, 10.1080/00337577908209140 Cheng, 1987 Kasper, 1988 Fiory, 1984, J. Appl. Phys., 56, 1227, 10.1063/1.334055 Ishizaka, 1982, Collected Papers of MBE-CST-2, Tokyo, 182