Investigation on the electrically inactive antimony at thermal equilibrium in silicon

R. Angelucci1, E. Landi1, D. Nobili1, S. Solmi1
1CNR-Istituto LAMEL, Via Castagnoli 1, I-40126 Bologna, Italy

Tài liệu tham khảo

Angelucci, 1987, 405 Nobili, 1989, J. Electrochem. Soc., 136, 1142, 10.1149/1.2096808 Olesinski, 1985, Bull. Alloy Phase Diagrams, 6, 445, 10.1007/BF02869508 Fair, 1986, J. Mater. Res., 1, 705, 10.1557/JMR.1986.0705