Inverse Metal-Assisted Chemical Etching Produces Smooth High Aspect Ratio InP Nanostructures

Nano Letters - Tập 15 Số 1 - Trang 641-648 - 2015
Seung Hyun Kim1, Parsian K. Mohseni1, Yi Song1, Tatsumi Ishihara2, Xiuling Li1
1Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
2Department of Applied Chemistry and Faculty of Engineering, Kyushu University, Fukuoka, Kyushu, Japan

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