Interferential lithography of Bragg gratings on hybrid organic–inorganic sol–gel materials

Microelectronic Engineering - Tập 88 - Trang 1923-1926 - 2011
G. Della Giustina1, G. Zacco2,3,4, E. Zanchetta1, M. Gugliemi1, F. Romanato2,3,4, G. Brusatin1
1Department of Mechanical Engineering, Materials Section, University of Padova, Italy
2IOM-CNR TASC National Laboratory, 34012 Basovizza, Trieste, Italy
3LaNN – Laboratory for Nanofabrication of Nanodevices, Corso Stati Uniti 4, Padova, Italy
4University of Padova, Department of Physics, Via Marzolo 8, Padova, Italy

Tài liệu tham khảo

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Thông tin xuất bản

Microelectronic Engineering

Tập 88

1923-1926

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