Infrared focal plane array incorporating silicon IC process compatible bolometer

IEEE Transactions on Electron Devices - Tập 43 Số 11 - Trang 1844-1850 - 1996
Akio Tanaka1, S. Matsumoto2, Nanao Tsukamoto3, S. Itoh1, Kazuhiro Chiba1, Tsutomu Endoh1, Akihiro Nakazato1, Kuniyuki Okuyama1, Y. Kumazawa4, M. Hijikawa2, Hideki Gotoh5, Тадатсугу Танака1, Nobukazu Teranishi1
1Microelectronics Research Laboratories, NEC Corporation Limited, Kanagawa, Japan
2Electro-Optics Division, NEC Corporation Limited, Tokyo, Japan
3NEC AeroSpace Systems Limited, Tokyo, Japan
4Nippon Systemware Company Limited, Tokyo, Japan
5NEC Glass Components Company Limited, Kanagawa, Japan

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Tài liệu tham khảo

10.1117/12.189240

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wood, 1993, uncooled thermal imaging with monolithic silicon focal planes, Proc SPIE, 2020, 322, 10.1117/12.160553

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IEEE Transactions on Electron Devices

Tập 43 Số 11

1844-1850

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