Influence of thermal annealing on electrical and optical properties of indium tin oxide thin films

Materials Science in Semiconductor Processing - Tập 26 - Trang 588-592 - 2014
Zhou Xu1,2, Peng Chen1,2, Zhenlong Wu1,2, Feng Xu1,2, Guofeng Yang1, Bin Liu1, Chongbin Tan2, Lin Zhang2, Rong Zhang1, Youdou Zheng1
1Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronics Science and Engineering, Nanjing University, Nanjing 210093, PR China
2Institute of Opto-Electronics, Nanjing University & Yangzhou, Yangzhou 225009, PR China

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