Influence of the heating ramp on the heteroepitaxial growth of SiC on Si

V Cimalla1, Th Stauden1, G Eichhorn1, J Pezoldt1
1TU Ilmenau, Institut für Festkörperelektronik, Postfach 100565, 98684 Ilmenau, Germany

Tài liệu tham khảo

Rimai, 1995, J. Appl. Phys., 77, 6601, 10.1063/1.359070 Nakashima, 1966, Jpn. J. Appl. Phys., 5, 874, 10.1143/JJAP.5.874 Ferro, 1996, Thin Solid Films, 278, 22, 10.1016/0040-6090(95)08034-1 Cimalla, 1998 Pezoldt, 1997, Diam. Relat. Mater., 6, 1311, 10.1016/S0925-9635(97)00087-3 Hamza, 1994, Surf. Sci., 317, 1129, 10.1016/0039-6028(94)90279-8 Cimalla, 1994, Mater. Sci. Eng., B29, 170 Dufour, 1997, Phys. Rev. B, 56, 4266, 10.1103/PhysRevB.56.4266 Hatayama, 1996, Inst. Phys. Conf. Ser., 142, 117 Yoshinobu, 1991, Jpn. J. Appl. Phys, 30, 1086, 10.1143/JJAP.30.L1086 Cimalla, 1995, J. Phys. IV (Colloq) C5, 2, 863 Stinespring, 1989, J. Appl. Phys., 65, 1733, 10.1063/1.342947 V. Cimalla, T. Stauden, G. Ecke, F. Scharmann, S. Sloboshanin, J.A. Schaefer, G. Eichhorn, J. Pezoldt, Appl. Phys. Lett. 73 (1998) 3542–3544. Bendler, 1997, 42. Int. Wiss. Kolloq.; Ilmenau (in German); Bd., 3, 697 Abramovitz, 1970 Pezoldt, 1995 Romanus, 1997, Mater. Sci. Eng. B, 47, 274, 10.1016/S0921-5107(97)00045-7 Teichert, 1995, MRS Symp. Proc., 399, 17, 10.1557/PROC-399-17 Cimalla, 1997, Mater. Sci. Eng., B46, 199, 10.1016/S0921-5107(96)01964-2 Steckl, 1992, IEEE Trans. Electron. Dev., 39, 64, 10.1109/16.108213 Kitabatake, 1996, Jpn. J. Appl. Phys., 35, 5261, 10.1143/JJAP.35.5261