Influence of stacking faults on the quality of GaN films grown on sapphire substrate using a sputtered AlN nucleation layer

Materials Research Bulletin - Tập 89 - Trang 193-196 - 2017
Zhibin Chen1, Jincheng Zhang1, Shengrui Xu1, Junshuai Xue1, Teng Jiang1, Yue Hao1
1Wide Bandgap Semiconductor Technology Disciplines State Key Laboratory, School of Microelectronics, Xi'dian University, Xi'an 710071, China

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