Impact of ultralow yttrium concentration on formation, morphology and optical properties of DC magnetron co-sputtered yttrium-doped ZnO films

Applied Surface Science Advances - Tập 6 - Trang 100127 - 2021
M. Shatalov1, A. Musin2, M. Zinigrad1, S. Rubtsov1, A. Kosenko1, V. Danchuk1
1Department of Chemical Engineering, Biotechnology and Materials, Faculty of Engineering, Ariel University, Ariel, Israel
2Physics Department, Faculty of Natural Sciences, Ariel University, Ariel, Israel

Tài liệu tham khảo

Jena, 2019, Halide perovskite photovoltaics: background, status, and future prospects, Chem. Rev., 119, 3036, 10.1021/acs.chemrev.8b00539 Jiang, 2018, SnO2: a Wonderful Electron Transport Layer for Perovskite Solar Cells, Small, 14, 10.1002/smll.201801154 Zhang, 2018, Perovskite solar cells with ZnO Electron-Transporting Materials, Adv. Mater., 30 An, 2017, High performance planar perovskite solar cells by ZnO electron transport layer engineering, Nano Energy, 39, 400, 10.1016/j.nanoen.2017.07.013 Özgür, 2005, A comprehensive review of ZnO materials and devices, J. Appl. Phys., 98, 10.1063/1.1992666 Chen, 2018, Review of ZnO transparent conducting oxides for solar applications, IOP Conf. Ser. Mater. Sci. Eng., 423, 10.1088/1757-899X/423/1/012170 Ellmer, 2008, ZnO and its applications, 21 Xiu, 2016, ZnO doping and defect engineering – a review, 10 Jiang, 2018, The advancing of zinc oxide nanoparticles for biomedical applications, Bioinorg. Chem. Appl., 10.1155/2018/1062562 Chanta, 2015, Development of anti-reflection coating layer for efficiency enhancement of ZnO dye-sensitized solar cells, J. Nanosci., 15, 7136 Lany, 2007, Dopability, intrinsic conductivity, and nonstoichiometry of transparent conducting oxides, Phys. Rev. Let., 98, 10.1103/PhysRevLett.98.045501 Zhang, 2001, Intrinsic n-type versus p-type doping asymmetry and the defect physics of ZnO, Phys. Rev B, 63 Cornelius, 2009, Achieving high free electron mobility in ZnO:al thin films grown by reactive pulsed magnetron sputtering, Appl. Phys. Lett., 94, 10.1063/1.3074373 Suzuki, 1996, Surface Flatness of Transparent Conducting ZnO:Ga Thin Films Grown by Pulsed Laser Deposition, Jpn. J. Appl. Phys., 35, L5457, 10.1143/JJAP.35.5457 Berginski, 2008, Recent development on surface-textured ZnO:al films prepared by sputtering for thin-film solar cell application, Thin Solid Films, 516, 5836, 10.1016/j.tsf.2007.10.029 Bhoslea, 2006, Electrical properties of transparent and conducting Ga doped ZnO, J. Appl. Phys., 100 Mereu, 2014, Optical and electrical studies of transparent conductive AZO and ITO sputtered thin films for CIGS photovoltaics, Phys. Status Solidi C, 11, 1464, 10.1002/pssc.201300631 Yu, 2007, Transparent conducting yttrium-doped ZnO thin films deposited by sol-gel method, Thin Solid Films, 515, 3840, 10.1016/j.tsf.2006.10.077 Kaur, 2005, Structural, electrical and optical properties of sol-gel derived yttrium doped ZnO films, Phys. Stat. Sol., 202, 1053, 10.1002/pssa.200420006 Üzar, 2018, Enhanced optical and electrical properties of Y-doped ZnO nanoparticles having different Y concentrations, Appl. Phys. A, 124, 303, 10.1007/s00339-018-1725-z Shin, 2019, Effect of annealing temperature on properties of yttrium‑doped ZnO thin films grown by radio‑frequency magnetron sputtering, Appl. Phys. A, 125, 809, 10.1007/s00339-019-3111-x Abliz, 2019, Effects of yttrium doping on the electrical performances and stability of ZnO thin-film transistors, Appl. Surf. Sci., 475, 565, 10.1016/j.apsusc.2018.12.236 Liu, 2013, ZnO-based transparent conductive thin films: doping, performance, and processing, J. Nanomater., 2013 Znaidi, 2010, Sol–gel-deposited ZnO thin films: a review, Mater. Sci. Eng. B, 174, 18, 10.1016/j.mseb.2010.07.001 Ugwu, 2018, The effect of annealing, doping on the properties and functionality of zinc oxide thin film; Review Danchuk, 2019, Characterization of sputtered ZnO blocking layers with surface plasmon resonance method, 186 Asinovski, 2005, Optical metrology performance analysis: approach and metrics Minami, 2000, Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering, Thin Solid Films, 366, 63, 10.1016/S0040-6090(00)00731-8 Vinoth, 2018, Ammonia sensing characteristics of Yttrium doped ZnO thin films by RF magnetron sputtering, Mater. Res. Express, 5, 10.1088/2053-1591/aac99a Hoon, 2011, Direct current magnetron sputter-deposited ZnO thin films, Appl. Surf. Sci., 257, 2508, 10.1016/j.apsusc.2010.10.012 Jin, 1994, Preparation of ZnO films by reactive evaporation, Thin Solid Films, 237, 16, 10.1016/0040-6090(94)90230-5 Reddy, 2012, Effect of film thickness on the structural, morphological and optical properties of nanocrystalline ZnO films, formed by RF magnetron sputtering, Adv. Mater. Lett., 3, 239, 10.5185/amlett.2012.3329 Tvarozek, 2007, Influence of sputtering parameters on crystalline structure of ZnO thin films, Thin Solid Films, 515, 8756, 10.1016/j.tsf.2007.03.125 Gonçalves, 2018, The effect of thickness on optical, structural and growth mechanism of ZnO thin film prepared by magnetron sputtering, Thin Solid Films, 661, 40, 10.1016/j.tsf.2018.07.008 Mahieu, 2008, Transport of sputtered particles through the gas phase, 199 Kim, 2011, Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure, J. Alloy. Compd., 509, 421, 10.1016/j.jallcom.2010.09.047 Thornton, 1974, Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings, J. Vac. Sci. Technol., 11, 666, 10.1116/1.1312732 Danchuk, 2020, Mechanisms of formation and morphology of co-sputtered YZO films at ultralow Yttrium concentration, 28 Prigogine, 1957 Ohring, 2002, Plasma and Ion Beam Processing of Thin Films, Mater. Sci. Thin Films, 203, 10.1016/B978-012524975-1/50008-2 Albertsson, 1989, Atomic displacement, anharmonic thermal vibration, expansivity and pyroelectric coefficient thermal dependences in ZnO, Acta Crystallogr. Sect. B, 34, 10.1107/S0108768188010109 Jiang, 2002, Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface, Appl. Phys. Lett., 80, 3090, 10.1063/1.1473683 Slater, 1964, Atomic radii in crystals, J. Chem. Phys., 39, 3199, 10.1063/1.1725697 Danylchenko, 2006, Electron diffraction study of two-component clusters Ar–Kr: features of the nucleation, growth mechanisms, and structural states, Low Temp. Phys., 32, 1182, 10.1063/1.2400697 Kuni, 2001, Theory of heterogeneous nucleation for vapor undergoing a gradual metastable state formation, Usp. Fiz. Nauk, 171, 345, 10.3367/UFNr.0171.200104a.0345 Palatnik, 1972 Ohring, 2002, 357 Tauc, 1974 Tan, 2005, Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition, J. Appl. Phys., 98, 10.1063/1.1940137 Zhang, 2020, Machine learning optical band gaps of doped-ZnO films, Opt. Int. J. Light Electron Opt., 217, 10.1016/j.ijleo.2020.164808 Jain, 2006, Band gap widening and narrowing in moderately and heavily doped n-ZnO films, Solid State Electron., 50, 1420, 10.1016/j.sse.2006.07.001 Turgut, 2015, The influence of Y contribution on crystallographic, topographic and optical properties of ZnO: a heterojunction diode application, Superlattices Microstruct., 86, 363, 10.1016/j.spmi.2015.08.002 Burstein, 1954, Anomalous optical absorption limit in InSb, Phys. Rev., 93, 632, 10.1103/PhysRev.93.632 Daniel, 2010, Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by RF magnetron sputtering, Phys. B Condens. Matter, 405, 1782, 10.1016/j.physb.2010.01.039 Tsai, 2010, Transparent conducting Al and Y codoped ZnO thin film deposited by DC sputtering, Mater. Chem. Phys., 123, 300, 10.1016/j.matchemphys.2010.04.015 Li, 2013, Effects of free electrons and quantum confinement in ultrathin ZnO films: a comparison between undoped and Al-doped ZnO, Opt. Express, 21, 10.1364/OE.21.014131 Kaur, 2016, Stress relaxation and transitions in optical bandgap of yttrium doped zinc oxide (YZO) thin films, Curr. Appl. Phys., 16, 231, 10.1016/j.cap.2015.12.004 Nie, 2008, Quantum confinement effect in ZnO thin films grown by pulsed laser deposition, Appl. Phys. Lett., 93, 10.1063/1.3010376 Malek, 2014, Thermal annealing-induced formation of ZnO nanoparticles: minimum strain and stress ameliorate preferred c-axis orientation -and crystal-growth properties, J. Alloy. Compd., 610, 575, 10.1016/j.jallcom.2014.05.036 Chen, 1998, Plasma assisted molecular beam epitaxy of ZnO on c-plane sapphire: growth and characterization, J. Appl. Phys., 84, 3912, 10.1063/1.368595 Bagnall, 1998, Room temperature excitonic stimulated emission from zinc oxide epilayers grown by plasma-assisted MBE, J. Cryst. Growth, 184–185 Ji, 2016, ZnO, Luminescence and scintillation studied via photoexcitation, X-ray excitation, and gamma-induced positron spectroscopy, Sci. Rep., 6, 31238, 10.1038/srep31238 Wang, 2002, Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering, Appl. Surf. Sci., 201, 123, 10.1016/S0169-4332(02)00570-6 Auret, 2002, Electrical characterization of vapor-phase-grown single-crystal ZnO, Appl. Phys. Lett., 80, 1340, 10.1063/1.1452781 Rakhshani, 2007, Successive chemical solution deposition of ZnO films on flexible steel substrate: structure, photoluminescence and optical transitions, Appl. Phys. A, 86, 377, 10.1007/s00339-006-3785-8 Ahn, 2009, A comparative analysis of deep level emission in ZnO layers deposited by various methods, Appl. Phys., 105 Gupta, 2019, Defect-induced photoluminescence from gallium-doped zinc oxide thin films: influence of doping and energetic ion irradiation, Phys. Chem. Chem. Phys., 21, 15019, 10.1039/C9CP02148E Jin, 2000, Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition, Thin Solid Films, 366, 107, 10.1016/S0040-6090(00)00746-X Vempati, 2012, One-step synthesis of ZnO nanosheets: a blue-white fluorophore, Nanoscale Res. Lett., 7, 470, 10.1186/1556-276X-7-470 Kr. Baitha, 2015, Structural and spectroscopic diagnosis of ZnO/SnO2 nanocomposite influenced by Eu3+, J. Rare Earths, 33, 805, 10.1016/S1002-0721(14)60488-9 Chong, 2012, Synthesis, characterization and room temperature photoluminescence properties of Al doped ZnO nanorods, Physica E, 44, 1399, 10.1016/j.physe.2012.03.001 Lathika Devi, 2010, Photoluminescent properties of Sm3+-doped zinc oxide nanostructures, J. Lumin., 130, 1221, 10.1016/j.jlumin.2010.02.028 Yogamalar, 2012, Dopant induced bandgap narrowing in Y-doped zinc oxide nanostructures, J. Nanosci., 12, 75