Impact of structure on mechanical properties and oxidation behavior of magnetron sputtered cubic and hexagonal MoNx thin films

Martin, 2009 Sangiovanni, 2012, Toughness enhancement in TiAlN-based quarternary alloys, Thin Solid Films, 520, 4080, 10.1016/j.tsf.2012.01.030 Kindlund, 2013, Toughness enhancement in hard ceramic thin films by alloy design, APL Materials, 1, 42104, 10.1063/1.4822440 Balasubramanian, 2017, Phase stability and mechanical properties of Mo1-xNx with 0 ≤ x ≤ 1, J Appl Phys, 122, 10.1063/1.4998686 Ozsdolay, 2017, Elastic constants of epitaxial cubic MoN x (001) layers, Surf Coat Technol, 325, 572, 10.1016/j.surfcoat.2017.07.015 Rudnik, 1991, High rate reactive sputtering of MoNx coatings, Surf Coat Technol, 49, 293, 10.1016/0257-8972(91)90072-5 Maoujoud, 1992, Deposition parameter effects on the composition and the crystalline state of reactively sputtered molybdenum nitride, Surf Coat Technol, 52, 179, 10.1016/0257-8972(92)90044-B Inumaru, 2005, Synthesis and Characterization of Superconducting β-Mo 2 N Crystalline Phase on a Si Substrate, Chem Mater, 17, 5935, 10.1021/cm050708i Perry, 1992, Crystal structure of molybdenum nitride films made by reactive cathodic arc evaporation, 261 Klimashin, 2016, The impact of nitrogen content and vacancies on structure and mechanical properties of Mo–N thin films, J Appl Phys, 120, 10.1063/1.4966664 Gilewicz, 2013, The properties of molybdenum nitride coatings obtained by cathodic arc evaporation, Surf Coat Technol, 236, 149, 10.1016/j.surfcoat.2013.09.005 Altarawneh, 2016, Conversion of NO into N 2 over γ-Mo 2 N, J. Phys. Chem. C, 120, 22270, 10.1021/acs.jpcc.6b04107 Zaman, 2017, Carbon monoxide hydrogenation on potassium promoted Mo 2 N catalysts, Appl Catal A, 532, 133, 10.1016/j.apcata.2016.12.015 Anitha, 1994, Structure and properties of reactivity sputtered γ-Mo2N hard coatings, Thin Solid Films, 245, 1, 10.1016/0040-6090(94)90867-2 Valli, 1986, Tribological properties of MoN x coatings in contact with copper, J Vac Sci Technol A, 4, 2850, 10.1116/1.573689 Anitha, 1993, Study of sputtered molybdenum nitride as a diffusion barrier, Thin Solid Films, 236, 306, 10.1016/0040-6090(93)90687-K Fujimoto, 1987, Formation of molybdenum nitride films by ion beam and vapor deposition method, Nucl Instrum Meth B, 19-20, 791, 10.1016/S0168-583X(87)80159-3 Luo, 2011, Controlling Crystal Structure and Oxidation State in Molybdenum Nitrides through Epitaxial Stabilization, J Phys Chem C, 115, 17880, 10.1021/jp2048376 Schleinkofer, 2014, 1.16 - Coating Applications for Cutting Tools, 453 Voevodin, 2014, Hard coatings with high temperature adaptive lubrication and contact thermal management: review, Surf Coat Technol, 257, 247, 10.1016/j.surfcoat.2014.04.046 Zin, 2018, Mechanical properties and tribological behaviour of Mo-N coatings deposited via high power impulse magnetron sputtering on temperature sensitive substrates, Tribol Int, 119, 372, 10.1016/j.triboint.2017.11.007 Suszko, 2005, The role of surface oxidation in friction processes on molybdenum nitride thin films, Surf Coat Technol, 194, 319, 10.1016/j.surfcoat.2004.07.119 Sergevnin, 2016, Wear behaviour of wear-resistant adaptive nano-multilayered Ti-Al-Mo-N coatings, Appl Surf Sci, 388, 13, 10.1016/j.apsusc.2016.06.102 Bouaouina, 2018, Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge, Surf Coat Technol, 333, 32, 10.1016/j.surfcoat.2017.10.028 Kazmanli, 2003, Effect of nitrogen pressure, bias voltage and substrate temperature on the phase structure of Mo–N coatings produced by cathodic arc PVD, Surf Coat Technol, 167, 77, 10.1016/S0257-8972(02)00866-6 Kommer, 2018, Enhanced wear resistance of molybdenum nitride coatings deposited by high power impulse magnetron sputtering by using micropatterned surfaces, Surf Coat Technol, 333, 1, 10.1016/j.surfcoat.2017.10.071 Wang, 2017, Effect of nitrogen flow rate on structure and properties of MoN x coatings deposited by facing target sputtering, J Alloy Compd, 701, 1, 10.1016/j.jallcom.2017.01.077 Pintaude, 2014, Introduction of the Ratio of the Hardness to the Reduced Elastic Modulus for Abrasion Tsui, 1995, Nanoindentation and Nanoscratching of Hard Carbon Coatings for Magnetic Disks, MRS Proc, 383, 155, 10.1557/PROC-383-447 Musil, 2007, Toughness of hard nanostructured ceramic thin films, Surface and Coatings Technology, 201, 5148, 10.1016/j.surfcoat.2006.07.020 Zhu, 2013, Phase composition and tribological performance of molybdenum nitride coatings synthesized by IBAD, Surf Coat Technol, 228, S184, 10.1016/j.surfcoat.2012.06.032 Baltrusaitis, 2015, Generalized molybdenum oxide surface chemical state XPS determination via informed amorphous sample model, Appl Surf Sci, 326, 151, 10.1016/j.apsusc.2014.11.077 Solak, 2003, Oxidation behavior of molybdenum nitride coatings, Surf Coat Technol, 174-175, 713, 10.1016/S0257-8972(03)00702-3 Gassner, 2006, Magnéli phase formation of PVD Mo–N and W–N coatings, Surf Coat Technol, 201, 3335, 10.1016/j.surfcoat.2006.07.067 Magnéli, 1953, Structures of the ReO 3 -type with recurrent dislocations of atoms: `homologous series' of molybdenum and tungsten oxides, Acta Cryst, 6, 495, 10.1107/S0365110X53001381 Liu, 2019, Tribological Properties of Mo2N Films at Elevated Temperature, Coatings, 9, 734, 10.3390/coatings9110734 Krywka, 2006, The new diffractometer for surface X-ray diffraction at beamline BL9 of DELTA, J Synchrotron Radiat, 13, 8, 10.1107/S0909049505035685 Solé, 2007, A multiplatform code for the analysis of energy-dispersive X-ray fluorescence spectra, Spectrochim Acta B, 62, 63, 10.1016/j.sab.2006.12.002 Ravel, 2005, ATHENA, ARTEMIS, HEPHAESTUS: data analysis for X-ray absorption spectroscopy using IFEFFIT, J Synchrotron Radiat, 12, 537, 10.1107/S0909049505012719 Villars, 2012 Villars, 2012 Jauberteau, 2015, Molybdenum Nitride Films: Crystal Structures, Synthesis, Mechanical, Electrical and Some Other Properties, Coatings, 5, 656, 10.3390/coatings5040656 Koutná, 2016, Point defects stabilise cubic Mo-N and Ta-N, J. Phys. D: Appl. Phys., 49, 10.1088/0022-3727/49/37/375303 Shen, 2003, Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films, Mater Sci Eng A, 359, 158, 10.1016/S0921-5093(03)00336-8 Oettel, 1995, Residual stresses in nitride hard coatings prepared by magnetron sputtering and arc evaporation, Surf Coat Technol, 74-75, 273, 10.1016/0257-8972(95)08235-2 Elo, 2020, Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering, Surf Coat Technol, 397, 10.1016/j.surfcoat.2020.125990 Kattelus, 2002, Stress control of sputter-deposited Mo–N films for micromechanical applications, Microelectron Eng, 60, 97, 10.1016/S0167-9317(01)00585-8 Sarioglu, 2005, Measurement of residual stresses by X-ray diffraction techniques in MoN and Mo2N coatings deposited by arc PVD on high-speed steel substrate, Surf Coat Technol, 190, 238, 10.1016/j.surfcoat.2004.08.184 Tillmann, 2019, Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films, Materialia, 5, 10.1016/j.mtla.2018.100186 Papaconstantopoulos, 1985, Electronic properties of transition-metal nitrides, Phys Rev B, 31, 752, 10.1103/PhysRevB.31.752 Medjani, 2006, Effect of substrate temperature and bias voltage on the crystallite orientation in RF magnetron sputtered AlN thin films, Thin Solid Films, 515, 260, 10.1016/j.tsf.2005.12.145 Patscheider, 2003, Nanocomposite Hard Coatings for Wear Protection, MRS Bull, 28, 180, 10.1557/mrs2003.59 Jin, 2012, Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering, Journal of Elec Materi, 41, 1948, 10.1007/s11664-012-1999-4 Chiu, 2007, Deposition and characterization of reactive magnetron sputtered aluminum nitride thin films for film bulk acoustic wave resonator, Thin Solid Films, 515, 4819, 10.1016/j.tsf.2006.12.181 Kreider, 2020, Nitride or Oxynitride? Elucidating the Composition–Activity Relationships in Molybdenum Nitride Electrocatalysts for the Oxygen Reduction Reaction, Chem Mater, 32, 2946, 10.1021/acs.chemmater.9b05212 Yamamoto, 2008, Assignment of pre-edge peaks in K-edge x-ray absorption spectra of 3d transition metal compounds: electric dipole or quadrupole?, X-Ray Spectrometry, 37, 572, 10.1002/xrs.1103 Rees, 2016, Experimental and theoretical correlations between vanadium K-edge X-ray absorption and K $$\varvec{\beta} $$ β emission spectra, J Biol Inorg Chem, 21, 793, 10.1007/s00775-016-1358-7 Tanaka, 1988, X-ray absorption (EXAFS/XANES) study of supported vanadium oxide catalysts. Structure of surface vanadium oxide species on silica and γ-alumina at a low level of vanadium loading, J. Chem. Soc., Faraday Trans. 1, 84, 2987, 10.1039/f19888402987 MANDE, 1983, Chemical Shifts in X-ray Absorption Spectra, 287 Wong, 1984, K-edge absorption spectra of selected vanadium compounds, Phys. Rev. B, 30, 5596, 10.1103/PhysRevB.30.5596 Ressler, 2002, Bulk Structural Investigation of the Reduction of MoO3 with Propene and the Oxidation of MoO2 with Oxygen, J Catal, 210, 67, 10.1006/jcat.2002.3659 Kopachevska, 2015, Determination of molybdenum oxidation state on the mechanochemically treated MoO3, Him. Fiz. Tehnol. Poverhni, 6, 474, 10.15407/hftp06.04.474 Ressler, 2000, Time-Resolved XAS Investigation of the Reduction/Oxidation of MoO3−x, J Catal, 191, 75, 10.1006/jcat.1999.2772 Macis, 2019, Structural Evolution of MoO3 Thin Films Deposited on Copper Substrates upon Annealing: An X-ray Absorption Spectroscopy Study, Condensed Matter, 4, 41, 10.3390/condmat4020041 Pande, 2015, Pseudocapacitive charge storage via hydrogen insertion for molybdenum nitrides, J Power Sources, 289, 154, 10.1016/j.jpowsour.2015.03.171 Ressler, 2001, Solid state kinetics of the oxidation of MoO2 investigated by time-resolved X-ray absorption spectroscopy, Solid State Commun, 119, 169, 10.1016/S0038-1098(01)00223-X Wang, 2015, Oxidation behavior of magnetron sputtered Mo2N/AlN multilayer coatings during heat treatment, Ceram Int, 41, 7028, 10.1016/j.ceramint.2015.01.156 Ramadorai, 1975, The kinetics of molybdenum dioxide oxidation, Metall Mater Trans B, 6, 579, 10.1007/BF02913851 Li, 2000, Use of a Solid-State Oxygen Pump to Study Oxidation Kinetics of Cr and Mo, Oxid Met, 53, 577, 10.1023/A:1004641328140 Magnéli, 1952, Identification of Molybdenum and Tungsten Oxides by X-Ray Powder Patterns, Analytical Chemistry, 24, 1998, 10.1021/ac60072a039 Wang, 2016, Study on oxidation mechanism and kinetics of MoO2 to MoO3 in air atmosphere, International Journal of Refractory Metals and Hard Materials, 57, 115, 10.1016/j.ijrmhm.2016.03.001 Pachlhofer, 2016, Structure evolution in reactively sputtered molybdenum oxide thin films, Vacuum, 131, 246, 10.1016/j.vacuum.2016.07.002 Floquet, 1992, Structural and morphological studies of the growth of MoO 3 scales during high-temperature oxidation of molybdenum, Oxid Met, 37, 253, 10.1007/BF00665191 Cárdenas-Lizana, 2011, β-Molybdenum nitride: synthesis mechanism and catalytic response in the gas phase hydrogenation of p-chloronitrobenzene, Catal. Sci. Technol., 1, 794, 10.1039/c0cy00011f Zhang, 2014, Thermodynamic modeling and first-principles calculations of the Mo–O system, Calphad, 45, 178, 10.1016/j.calphad.2013.12.006