Identification of Fragment Ions by Their Kinetic Energy Gained During Dissociative Ionization by Electron Impact
Tóm tắt
A technique is described, which supports the plasma mass spectrometry to distinguish possible sources of ion peaks found in the mass spectrum of the neutral gas. The proposed method is based on the measurement of the kinetic energy which the fragment ions gain during dissociative ionization by electron impact inside the ion source of the spectrometer. This approach is of special interest for applications in plasma processes such as plasma assisted deposition or etching techniques where complicated molecules are involved. The principle of the method is demonstrated and discussed for the examination of various fragment ions as CH3
+, C2H2
+, C2H3
+, C2H5
+ and CH3O+ in the neutral gas spectrum of an 13.56 MHz rf discharge in an Argon-Tetraethoxysilane (TEOS) mixture.
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