High frequency shear horizontal plate acoustic wave devices

Ultrasonics - Tập 49 - Trang 760-764 - 2009
G. Vohra1, S.G. Joshi1, B.D. Zaitsev2, I.E. Kuznetsova2, A.A. Teplykh2
1Department of Electrical and Computer Engineering, Marquette University, Milwaukee, WI 53201-1881, USA
2Institute of Radio Engineering and Electronics of Russian Academy of Sciences, Saratov branch, Saratov 410019, Russia

Tài liệu tham khảo

Viktorov, 1967 Wenzel, 1998, A multisensor employing an ultrasonic Lamb-wave oscillator, IEEE Trans. Electron. Dev., 35, 735 B.J. Costello, B.A. Martin, R.M. White, Ultrasonic plate waves for biochemical measurements, in: Proceedings of IEEE Ultrasonics Symposium, 1989, pp. 977–981. Vellekoop, 1994, A multi-purpose smart acoustic Lamb wave sensor system, Sensor Actuator, A43, 175, 10.1016/0924-4247(93)00689-2 Weinberg, 2003, Fluid damping in resonant flexural plate wave device, J. Microelectromech. Syst., 12, 567, 10.1109/JMEMS.2003.818452 Gachagan, 2005, A flexible piezoelectric transducer design for efficient generation and reception of ultrasonic Lamb waves, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 52, 1175, 10.1109/TUFFC.2005.1504004 Lee, 2006, Lamb waves of a piezoelectric plate subjected to conductive fluid loading: an experimental study, IEEE Transact Ultrason. Ferroelectr. Freq. Control, 53, 1617 Yantchev, 2007, Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric Lamb wave mode, IEEE Transact. Ultrason. Ferroelectr. Freq. Control, 54, 87, 10.1109/TUFFC.2007.214 Zaitsev, 2001, Shear horizontal acoustic waves in piezoelectric plates bordered with conductive liquid, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 48, 627, 10.1109/58.911748 Joshi, 2006, Characteristics of fundamental acoustic wave modes in thin piezoelectric plates, Ultrasonics, 44, e787, 10.1016/j.ultras.2006.05.013 Zaitsev, 2006, New method of change in temperature coefficient delay of acoustic waves in thin piezoelectric plates, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 53, 2113, 10.1109/TUFFC.2006.151 Campbell, 1998 Martin, 1989, Characterization of SH acoustic plate mode liquid sensors, Sensor Actuator, 20, 253, 10.1016/0250-6874(89)80124-6