Heterogeneous recombination of neutral oxygen atoms on niobium surface
Tài liệu tham khảo
H.V. Boenig, Plasma Science and Technology, Cornell University Press, London, 1982.
Agarwal, 2002, J. Vac. Sci. Technol, 20, 1587, 10.1116/1.1494816
Seo, 2002, J. Vac. Sci. Technol. B, 20, 1548, 10.1116/1.1495904
Mozetič, 2000, Thin Solid Films, 376, 5, 10.1016/S0040-6090(00)01347-X
Gunde, 2002, Surf. Coat. Int., 85, 115, 10.1007/BF02699751
Kotulanova, 2002, Acta Chim. Slov., 49, 437
Kawata, 2002, Jpn. J. Appl. Phys. Part 1, 41, 4327, 10.1143/JJAP.41.4327
A. Ricard, Reactive Plasmas, Societe Francaise du Vide, Paris, 1996.
Šorli, 1996, Inf. Midem., 26, 35
M.R. Wertheimer, L. Marinu, E.M. Liston, Plasma sources for polymer surface treatment, in: S.I. Shah (Ed.), Handbook of Thin Film Process Technology, Institute of Physics Publishing, Bristol, 1998.
Turunen, 2002, Polym. Sci. B, 40, 2137, 10.1002/polb.10274
Ueno, 2000, J. Dent. Res., 79, 1071
Moisan, 2002, Pure Appl. Chem., 74, 349, 10.1351/pac200274030349
Ricard, 2002, Vide, 57, 1
Pagnon, 1995, J. Phys. D, 28, 1856, 10.1088/0022-3727/28/9/014
Czerwiec, 1998, Surf. Coat. Tech., 98, 1411, 10.1016/S0257-8972(97)00256-9
Magne, 1993, J. Phys. III, 3, 1871
Merel, 1998, Plasma Sour. Sci. Technol., 7, 550, 10.1088/0963-0252/7/4/012
Legrand, 1997, New J. Chem., 21, 1047
Ricard, 2001, Surf. Coat. Tech., 142–144, 333, 10.1016/S0257-8972(01)01276-2
Carruth, 1990, Rev. Sci. Instr., 61, 1211, 10.1063/1.1141214
Mozetič, 1998, Inform. Midem., 28, 175
Šorli, 2000, Vac. Sci. Technol., A18, 338, 10.1116/1.582189
Vesel, 2001, Vacuum, 61, 373, 10.1016/S0042-207X(01)00147-6
Babiè, 2001, Rev. Sci. Instr., 72, 4110, 10.1063/1.1409567
Poberaj, 2002, J. Vac. Sci. Technol. A, 20, 189, 10.1116/1.1427893
Vesel, 2002, Physica B, 324, 261, 10.1016/S0921-4526(02)01411-4
U. Cvelbar, S. Pejovnik, M. Mozetič, A. Zalar, Appl. Surf. Sci. (2003), PII: S0169-4332(02)01286-2.
Vesel, 2002, Appl. Surf. Sci., 200, 94, 10.1016/S0169-4332(02)00647-5
Ohkido, 1994, Appl. Surf. Sci., 76–77, 261, 10.1016/0169-4332(94)90352-2
Mozetič, 2000, Appl. Surf. Sci., 158, 263, 10.1016/S0169-4332(00)00007-6
Surgers, 2001, Surf. Sci., 471, 209, 10.1016/S0039-6028(00)00908-0
Uehara, 2001, Surf. Sci., 472, 59, 10.1016/S0039-6028(00)00922-5
Ensinger, 1996, Surf. Coat. Technol., 85, 80, 10.1016/0257-8972(96)02888-5