Heteroepitaxial growth on microscale patterned silicon structures

Journal of Crystal Growth - Tập 280 - Trang 66-74 - 2005
G. Vanamu1, A.K. Datye1, Saleem H. Zaidi2
1Department of Chemical and Nuclear Engineering and Center for Micro-Engineered Materials, University of New Mexico, Albuquerque, NM-87131, USA
2Gratings, Inc., 2700 B Broadbent Parkway, N.E, Albuquerque, NM 87107, USA

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