Hermetically Packaged Microsensor for Quality Factor-Enhanced Photoacoustic Biosensing

Adams, 1976, Analytical optoacoustic spectrometry. Part II. Ultraviolet and visible optoacoustic spectra of some inorganic, biochemical and phytochemical samples, Analyst, 101, 553, 10.1039/an9760100553 Braslavsky, 1992, Time-resolved photothermal and photoacoustic methods applied to photoinduced processes in solution, Chem. Rev., 92, 1381, 10.1021/cr00014a007 Amato, 1992, Photoacoustic and photothermal deflection spectroscopy of semiconductors, IEE Proc. Sci. Meas. Technol., 139, 161, 10.1049/ip-a-3.1992.0027 Black, 2004, Enhanced photothermal displacement spectroscopy for thin-film characterization using a Fabry-Perot resonator, J. Appl. Phys., 95, 7655, 10.1063/1.1728312 Nordal, 1979, Photothermal Radiometry, Phys. Scr., 20, 659, 10.1088/0031-8949/20/5-6/020 Wang, 2012, Photoacoustic Tomography: in vivo imaging from organelles to organs, Science, 335, 1458, 10.1126/science.1216210 Hu, 2010, Label-free photoacoustic ophthalmic angiography, Opt. Lett., 35, 1, 10.1364/OL.35.000001 Rajian, 2011, 13 Laufer, 2005, In vitro measurements of absolute blood oxygen saturation using pulsed near-infrared photoacoustic spectroscopy: accuracy and resolution, Phys. Med. Biol., 50, 4409, 10.1088/0031-9155/50/18/011 Rosencwaig, 1973, Photoacoustic spectroscopy of biological materials, Science, 181, 657, 10.1126/science.181.4100.657 Laufer, 2007, Quantitative spatially resolved measurement of tissue chromophore concentrations using photoacoustic spectroscopy: application to the measurement of blood oxygenation and haemoglobin concentration, Phys. Med. Biol., 52, 141, 10.1088/0031-9155/52/1/010 Christison, 1993, Laser photoacoustic determination of physiological glucose concentrations in human whole blood, Med. Biol. Eng. Comput., 31, 284, 10.1007/BF02458048 Kamm, 1976, Detection of weakly absorbing gases using a resonant optoacoustic method, J. Appl. Phys., 47, 3550, 10.1063/1.323153 Schäfer, 1997, Quantitative signal analysis in pulsed resonant photoacoustics, Appl. Opt., 36, 3202, 10.1364/AO.36.003202 El-Busaidy, 2020, Modelling of open photoacoustic resonators, Photoacoustics., 18, 10.1016/j.pacs.2020.100161 Kottmann, 2011, New photoacoustic cell design for studying aqueous solutions and gels, Rev. Sci. Instrum., 82, 10.1063/1.3622154 Pleitez, 2013, Rev. Sci. Instrum., 84, 10.1063/1.4816723 Kottmann, 2013, Mid-infrared fiber-coupled photoacoustic sensor for biomedical applications, Sensors, 13, 535, 10.3390/s130100535 Zheng, 2020, Quartz-enhanced photoacoustic spectroscopy employing pilot line manufactured custom tuning forks, Photoacoustics, 17, 10.1016/j.pacs.2019.100158 Giglio, 2020, Broadband detection of methane and nitrous oxide using a distributed-feedback quantum cascade laser array and quartz-enhanced photoacoustic sensing, Photoacoustics, 17, 10.1016/j.pacs.2019.100159 Miklós, 1994, Effective noise reduction on pulsed laser excitation of modes in a high-Q photoacoustic resonator, J. Phys. IV., 04 Brand, 1995, Pulsed-laser excitation of acoustic modes in open high-Q photoacoustic resonators for trace gas monitoring: results for C_2H_4, Appl. Opt., 34, 3257, 10.1364/AO.34.003257 Karbach, 1985, High precision acoustic spectroscopy by laser excitation of resonator modes, J. Chem. Phys., 83, 1075, 10.1063/1.449470 Rosencwaig, 1976, Theory of the photoacoustic effect with solids, J Appl Phys., 47, 7, 10.1063/1.322296 Thompson, 1988, Design, characterization, and applications of a photoacoustic cell for temperature and atmosphere control, Anal. Chem., 60, 1027, 10.1021/ac00161a016 Bechthold, 1981, Variable temperature photoacoustic spectroscopy. II. Temperature characteristic and applications, Opt. Commun., 36, 373, 10.1016/0030-4018(81)90245-5 LaHaye, 2004, Approaching the quantum limit of a nanomechanical resonator, Science, 304, 74, 10.1126/science.1094419 Burg, 2007, Weighing of biomolecules, single cells and single nanoparticles in fluid, Nature, 446, 1066, 10.1038/nature05741 Arlett, 2006, Self-sensing micro- and nanocantilevers with attonewton-scale force resolution, Nano Lett., 6, 1000, 10.1021/nl060275y Diebold, 1994, 80, 13 Lai, 1982, Theory of the pulsed optoacoustic technique, J. Acoust. Soc. Am., 72, 2000, 10.1121/1.388631 Smith, 1995, Limits of force microscopy, Rev. Sci. Instrum., 66, 3191, 10.1063/1.1145550 Achenbach, 1973 Yasumura, 2000, Quality factors in micron- and submicron-thick cantilevers, J. Microelectromechanical Syst., 9, 117, 10.1109/84.825786 Lifshitz, 2000, Thermoelastic damping in micro- and nanomechanical systems, Phys. Rev. B., 61, 5600, 10.1103/PhysRevB.61.5600 Hutchinson, 2004, Dissipation in nanocrystalline-diamond nanomechanical resonators, Appl. Phys. Lett., 84, 972, 10.1063/1.1646213 Yang, 2000, Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers, Appl. Phys. Lett., 77, 3860, 10.1063/1.1330225 Judge, 2007, Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures, J. Appl. Phys., 101, 10.1063/1.2401271 Hosaka, 1995, Damping characteristics of beam-shaped micro-oscillators, Sens. Actuators Phys., 49, 87, 10.1016/0924-4247(95)01003-J Bhiladvala, 2004, Effect of fluids on the Q factor and resonance frequency of oscillating micrometer and nanometer scale beams, Phys. Rev. E., 69, 10.1103/PhysRevE.69.036307 Huang, 2003, Quality factor issues in silicon carbide nanomechanical resonators TRANSDUCERS 03 12th Int, 1, 722 Newell, 1968, Miniaturization of tuning forks, Science, 161, 1320, 10.1126/science.161.3848.1320 Tenhunen, 1998, Non-invasive glucose measurement based on selective near infrared absorption; requirements on instrumentation and spectral range, Measurement, 24, 173, 10.1016/S0263-2241(98)00054-2 Xu, 2006, Photoacoustic imaging in biomedicine, Rev Sci Instrum., 23 Wiercigroch, 2017, Raman and infrared spectroscopy of carbohydrates: a review, Spectrochim. Acta. A. Mol. Biomol. Spectrosc., 185, 317, 10.1016/j.saa.2017.05.045 Vasko, 1971, Infrared and raman spectroscopy of carbohydrates: Part I: identification of O-H and C-H-related vibrational modes for D-glucose, maltose, cellobiose, and dextran by deuterium-substitution methods, Carbohydr. Res., 19, 297, 10.1016/S0008-6215(00)86160-1 Jacques, 2013, Optical properties of biological tissues: a review, Phys. Med. Biol., 58, R37, 10.1088/0031-9155/58/11/R37 Golic, 2003, Short-wavelength near-infrared spectra of sucrose, glucose, and fructose with respect to sugar concentration and temperature, Appl. Spectrosc., 57, 139, 10.1366/000370203321535033 Hemmer, 2016, Exploiting the biological windows: current perspectives on fluorescent bioprobes emitting above 1000 nm, Nanoscale Horiz., 1, 168, 10.1039/C5NH00073D Cook, 2011, Tissue-mimicking phantoms for photoacoustic and ultrasonic imaging, Biomed. Opt. Express., 2, 3193, 10.1364/BOE.2.003193 Farrer, 2015, Characterization and evaluation of tissue-mimicking gelatin phantoms for use with MRgFUS, J. Ther. Ultrasound., 3, 10.1186/s40349-015-0030-y Hall, 1997, Phantom materials for elastography, IEEE Trans. Ultrason. Ferroelectr. Freq. Control., 44, 1355, 10.1109/58.656639 Ku, 2001, Scanning microwave-induced thermoacoustic tomography: signal, resolution, and contrast, Med. Phys., 28, 4, 10.1118/1.1333409 Tabaddor, 2000, Influence of nonlinear boundary conditions on the single-mode response of a cantilever beam, Int. J. Solids Struct., 37, 4915, 10.1016/S0020-7683(99)00197-3 Kaajakari, 2004, Nonlinear limits for single-crystal silicon microresonators, J. Microelectromechanical Syst., 13, 715, 10.1109/JMEMS.2004.835771 Da Silva, 1988, Non-linear flexural-flexural-torsional-extensional dynamics of beams—I, Formulation, Int. J. Solids Struct., 24, 1225, 10.1016/0020-7683(88)90087-X Malatkar, 1996 Pleitez, 2013, In vivo noninvasive monitoring of glucose concentration in human epidermis by mid-infrared pulsed photoacoustic spectroscopy, Anal. Chem., 85, 1013, 10.1021/ac302841f Swofford, 1978, Analysis of the repetitively pulsed dual‐beam thermo‐optical absorption spectrometer, J. Appl. Phys., 49, 3667, 10.1063/1.325418 J.-Y. Kong, O. Miyawak, T. Yano, Effective Thermal Diffusivities of Some Protein Gels, (n.d.) 6. Aguilar Sandoval, 2015, Resonance frequency shift of strongly heated micro-cantilevers, J. Appl. Phys., 117, 10.1063/1.4922785 Jianqiang, 2002, Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature, Sens. Actuators Phys., 101, 37, 10.1016/S0924-4247(02)00146-2 Gysin, 2004, Temperature dependence of the force sensitivity of silicon cantilevers, Phys. Rev. B., 69, 10.1103/PhysRevB.69.045403 Mohanty, 2002, Intrinsic dissipation in high-frequency micromechanical resonators, Phys. Rev. B., 66, 10.1103/PhysRevB.66.085416 Quan, 1993, Glucose determination by a pulsed photoacoustic technique: an experimental study using a gelatin-based tissue phantom, Phys. Med. Biol., 38, 1911, 10.1088/0031-9155/38/12/014 Riquelme, 2015, Effect of physical state of gelatin-plasticizer based films on to the occurrence of Maillard reactions, Food Chem., 175, 478, 10.1016/j.foodchem.2014.12.008 Siimon, 2014, Effect of glucose content on thermally cross-linked fibrous gelatin scaffolds for tissue engineering, Mater. Sci. Eng. C., 42, 538, 10.1016/j.msec.2014.05.075 Maruo, 2003, In Vivo noninvasive measurement of blood glucose by near-infrared diffuse-reflectance spectroscopy, Appl. Spectrosc., 57, 1236, 10.1366/000370203769699090 Kohl, 1995, The influence of glucose concentration upon the transport of light in tissue-simulating phantoms, Phys. Med. Biol., 40, 1267, 10.1088/0031-9155/40/7/009 Yao, 2014, Sensitivity of photoacoustic microscopy, Photoacoustics, 2, 87, 10.1016/j.pacs.2014.04.002 Welch, 2011 Jensen, 2003, Influence of temperature on water and aqueous glucose absorption spectra in the near- and mid-infrared regions at physiologically relevant temperatures, Appl. Spectrosc., 57, 28, 10.1366/000370203321165179