Halide vapor phase epitaxy of ZnO studied by thermodynamic analysis and growth experiments

Journal of Crystal Growth - Tập 314 - Trang 108-112 - 2011
Tetsuo Fujii1,2, Naoki Yoshii3, Yoshinao Kumagai2, Akinori Koukitu2
1Research and Development Headquarters, ROHM Co., Ltd., 21 Saiin Mizosaki-cho, Ukyo-ku, Kyoto 615-8585, Japan
2Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan
3Technology Development Center, Tokyo Electron Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan

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