From Fermi acceleration to collisionless discharge heating

IEEE Transactions on Plasma Science - Tập 26 Số 3 - Trang 955-986 - 1998
M. A. Lieberman1, Valery Godyak2
1Department of Electrical Engineering and Computer Sciences Electronics Research Laboratory, University of California, Berkeley, CA, USA
2OSRAM SYLVANIA Development, Inc., Beverly, MA, USA

Tóm tắt

Từ khóa


Tài liệu tham khảo

10.1109/27.134029

10.1109/27.376565

10.1109/27.106806

10.1109/27.16552

akhiezer, 1976, on stochastic plasma heating by high-frequency fields, Fiz Plasmy, 2, 654

godyak, 1976, effective collision frequency of the electrons in rf discharge, Fiz Plasmy, 2, 1010

10.1063/1.112656

10.1063/1.350662

wood, 1991, Sheath heating in low pressure capacitive radio frequency discharges

10.1103/PhysRevE.48.3914

godyak, 1971, the statistical heating of electrons by oscillating boundaries of the plasma, Zhurnal Teknicheskoi Fiziki, 41, 1364

10.1016/0031-9163(64)90425-1

godyak, 1976, stationary low-pressure high-frequency discharge, Fiz Plasmy, 2, 141

lichtenberg, 1987, the effect of quasiaccelerator modes on diffusion, Physica, 28d, 371

10.1063/1.117115

lieberman, 1994, Principles of Plasma Discharges and Materials Processing

schneider, 1954, zum mechanisms der hochfrequenzentladung zwischen ebenen platten, A Angew Phys, 6, 456

kaganovich, 1998, on the role of collisions and non linear effects in so-called collisionless electron heating, Electron Kinetics in Glow Discharges

pavkovich, 1963, r.f. theory of the plasma sheath, Proc VI-th Conf Ionization Phenomena Gases, 3, 39

10.1103/PhysRevE.55.3408

10.1038/176916a0

10.1103/PhysRevE.54.757

10.1063/1.114663

10.1109/TPS.1986.4316522

10.1103/PhysRevLett.66.1469

vender, 1990, Numerical studies of the low pressure RF plasmas

10.1109/27.57527

10.1088/0963-0252/2/4/007

10.1063/1.358435

10.1116/1.578248

10.1109/27.106808

10.1063/1.102604

10.1109/27.24645

harwit, 1984, Cosmic Discovery&#x2014 The Search Scope and Heritage of Astronomy

10.1103/PhysRev.75.1169

10.1146/annurev.aa.18.090180.001445

10.4159/harvard.9780674418219

ulam, 1961, on some statistical properties of dynamical systems, Proc 4th Berkeley Symp Mathematical Statistics Probability, 3, 315

10.1109/TCSI.2008.922027

godyak, 1990, result reproduced in [21]

zaslavskii, 1965, mechanism for fermi acceleration in a one-dimensional case, Soviet Phys Dokl, 9, 989

10.1103/PhysRevLett.65.996

10.1063/1.336442

10.1088/0963-0252/1/1/006

10.1109/27.90309

godyak, 1979, experimental investigation of resonant rf discharge, Fiz Plasmy, 5, 400

10.1116/1.576220

godyak, 1986, Soviet radio frequency discharge research

10.1063/1.335395

lichtenberg, 1998, application of mapping dynamics and kinetic theory to analysis of a capacitive r.f. discharge, Electron Kinetics in Glow Discharges

10.1109/27.659533

10.1088/0963-0252/5/1/001

10.1109/27.467971

10.1007/978-3-642-69247-5

10.1063/1.362631

10.1063/1.872222

ichimaru, 1973, Basic Principles of Plasma Physics A Statistical Approach

10.1063/1.1762185

10.1016/0031-8914(49)90024-5

10.1063/1.346899

10.1063/1.111858

10.1109/27.106813

10.1109/27.467985

10.1103/PhysRevLett.76.2069

10.1109/27.597265

10.1103/PhysRevLett.75.1312

10.1103/PhysRev.94.1475

tsendin, 1975, energy distribution of electrons in a weakly ionized current-carrying plasma with transverse inhomogeneity, Sov Phys JETP, 39, 805

landau, 1946, oscillations of an electron plasma, J Phys (USSR), 10, 25

10.1088/0963-0252/4/2/004

landau, 1960, Electrodynamics of Continuous Media

budden, 1966, Radio Waves in the Ionosphere

10.1103/PhysRevLett.77.1286

10.1063/1.871979

10.1088/0032-1028/14/12/002

10.1088/0963-0252/5/3/013

kortschagen, 1996

godyak, 1998, icp kinetics and electromagntic fields in stochastically heated-regime, Electron Kinetics in Glow Discharges

10.1063/1.872455

kolobov, 1997, the anomalous skin effect in gas discharge plasmas, Plasma Sources Sci Technol, 6, 1, 10.1088/0963-0252/6/2/003

10.1088/0963-0252/1/3/006

10.1103/PhysRevLett.71.1844

10.1088/0963-0252/3/2/007

10.1103/PhysRevE.55.7536

kolobov, 1998, anomalous skin effect in bounded plasmas, Electron Kinetics in Glow Discharges

10.1143/JPSJ.65.2860

10.1088/0032-1028/17/9/006

10.1006/jcph.1995.1160

10.1088/0963-0252/5/2/007

10.1116/1.587106

10.1109/27.467974

brahic, 1971, numerical study of a simple dynamical system, Astron Astrophys, 12, 98

10.1103/PhysRevA.5.1852

10.1016/0167-2789(80)90027-5

goldstein, 1951, Classical Mechanics

10.1103/RevModPhys.17.323

landau, 1937, kinetic equation for the coulomb interaction, Zh Eksper Theor Fiz, 7, 203

sayasov, 1979, an analytical theory of the anomalous skin-effect in bounded plasmas, Helvetica Physica Acta, 52, 288

10.1063/1.341286

10.1103/PhysRevLett.44.1586

fried, 1961, The Plasma Dispersion Function

10.1103/PhysRevA.23.2664

joyce, 1979, effect of abnormal skin in an argon plasma, Helvetica Physica Acta, 51, 804

demirkhanov, 1964, skin effect in a high frequency ring discharge, Sov Phys JETP, 19, 791

10.1103/PhysRevA.32.2413

10.1098/rspa.1948.0123

10.1063/1.1694177

kondratenko, 1979, RF Field Penetration into Plasma

10.1103/PhysRev.88.1427.2

10.1063/1.360723

10.1063/1.1693058