Formation of nanostructured TiAlN, TiCrN, and TiSiN coatings using reactive magnetron sputtering

Veprek, S.J., et al., Different approaches to superhard coatings and nanocomposites, Thin Solid Films, 2005, vol. 476, no. 1, pp. 1–29.

Cavaleiro, A. and De Hosson, J., Nanostructured Coatings, Berlin: Springer-Verlag, 2006.

Musil, J. and Jirout, M., Toughness of hard nanostructured ceramic thin films, Proc. 5th Asian-European Int. Conf. on Plasma Surf. Eng., Quingdao, 2005, pp. 12–16.

Pogrebnyak, A.D., Shpak, A.P., Azarenkov, N.A., and Beresnev, V.M., Structure and properties of hard and superhard nanocomposite coatings, Usp. Fiz. Nauk, 2009, vol. 179, no. 1, pp. 35–64.

Komarov, F.F., Pil’ko, V.V., Konstantinov, S.V., Burmakov, A.P., and Zaikov, V.A., Properties of nanocrystalline coatings based on titanium nitride alloyed by impurities, Vestn. Baranovichskogo Gos. Univ., 2013, no. 1, pp. 14–21.

Oliver, W.C. and Pharr, G.M., An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments, J. Mater. Res., 1992, vol. 7, no. 6, pp. 1564–1583.

Rusakov, A.A., Rentgenografiya metallov (X-ray Analysis of Metals), Moscow: Atomizdat, 1977.

Komarov, F.F., Konstantinov, S.V., Kukareko, V.A., and Pil’ko, V.V., Structural features and hardness of TiN, TiCrN, TiSiN, and TiAlN layers deposited on 12Kh18N10T steel substrates by magnetron method, in Respublikanskii mezhvedomstvennyi sb. nauch. tr. “Metallurgiya” (Republican Interministerial Coll. of Sci. Papers “Metallurgy”), Minsk: BNTU, 2012, no. 34.

Komarov, F.F., Pilko, V.V., Pogrebnjak, A.D., Karvat, C., Kiszczak, K., and Kozak, C., Formation of perspective composite coatings by ion-beam assisted deposition, Acta Physica Polonica, 2013, vol. 123, pp. 800–803.