Fizeau interferometer for phase shifting interferometry in ultrahigh vacuum
Tóm tắt
We describe a phase shifting interferometer which is based on a frequency-tunable diode laser in a Littrow configuration and is suitable for operation in ultrahigh vacuum. A wave front distortion measurement of a thin glass plate with a repeatability of λ/1000 is presented.
Từ khóa
Tài liệu tham khảo
1997, Surf. Sci. Rep., 29, 193