Ferroelectric PZT Thin Films by Sol-Gel Deposition
Tóm tắt
Sol-gel spin coating has a low ‘thermal budget’, is cheap compared to vacuum-based techniques and is now routinely used to produce dense, pore-free ferroelectric films. PbZrx Ti(1 − x)O3 (PZT) is utilized in most applications because it has a large remanent polarization, high piezo- and pyroelectric coefficients and optimized electromechanical coupling factors, depending on precise composition. This paper will review some of the principles and applications of PZT films and highlight using transmission electron microscopy some of the basic problems and solutions involved in producing device-quality material on Si-substrates.
Tài liệu tham khảo
M.E. Lines and A.M. Glass, Principles and Applications of Ferroelectrics (Clarendon Press, Oxford, 1977).
B. Jaffe, W.R. Cook, and H. Jaffe, Piezoelectric Ceramics (Academic Press, London, 1971).
N.M. Shorrocks, A. Patel, M.J. Walker, and A.D. Parsons, Microelectronic Engineering 29, 59 (1995).
Y.L. Yu and S.J. Milne, Brit. Ceram. Proc. 54, 233 (1995).
R.W. Whatmore, P. Kirby, A. Patel, N.M. Shorocks, T. Bland, and M. Walker, in Proc. NATO Conf. on Sci. and Tech. of Electroceramics Films, E 284, (1993), p. 383.
K.G. Brooks, I.M. Reaney, R. Klissurska, Y. Huang, L. Bursill, and N. Setter, J. Mater. Res. 9(10), 2540 (1994).
K.D. Budd, S.K. Dey, and D.A. Payne, Brit. Ceram. Proc. 36, 107 (1985).
D.V Taylor, private communication, Labo. de Céramique, E.P.F.L., Switzerland.
Klee, A. De Veirman, P. Van de Weijer, U. Mackens, and H. Van Hal. Philips Res. Rep. 47, 263 (1993).
S. Hirano, T. Yugo, K. Kikuta, Y. Araki, M. Saitoh, and S. Ogasahara, J. Am. Ceram. Soc. 75(10), 2785 (1992).
Ian M. Reaney, K. Brooks, R. Klissurska, C. Pawlaczyk, and N. Setter, J. Am. Ceram. Soc. 77(5), 1209 (1994).
B.A. Tuttle, H.N. Al Shareef, W.L. Warren, M.V. Raymond, T.J. Headley, J.A. Voigt, J. Evans, and R. Ramesh, Microelectronic Engineering, 29, 223 (1995).
S. Chen and I Chen, IMF Proc. Aug. (1993).
I.M. Reaney, T. Maeder, K.G Brooks, and P. Muralt, Brit. Ceram. Proc. 54, 219 (1995).