Facile fabrication of stretchable photonic Ag nanostructures by soft-contact patterning of ionic Ag solution coatings

Nanophotonics - Tập 11 Số 11 - Trang 2693-2700 - 2022
Minwook Kim1, Dong Kyo Oh2, Jeong Dae Kim1,3, Minsu Jeong2, Hongyoon Kim2, Chunghwan Jung4, Jungkeun Song1, Won‐Jun Lee1, Junsuk Rho4,2,5,6, Jong G. Ok1
1Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea
2Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
3Etch Team, SEMES Co., Ltd. , Cheonan , Chungcheongnam-do 31040 , Republic of Korea
4Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 37673, Republic of Korea
5National Institute of Nanomaterials Technology (NINT), Pohang 37673, Republic of Korea
6POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics, Pohang, 37673, Republic of Korea

Tóm tắt

Abstract We describe a rapid and simple method to create Ag nanostructures by using direct mechanical patterning of ionic Ag ink coating under gentle pressure, then thermal annealing to reduce the ionic Ag ink to a metallic Ag layer. The ionic liquid-phase Ag coating is easily obtained by spin-coating ionic Ag ink that has appropriate Ag concentration and can be either printed or imprinted on the desired substrate by using a soft elastomer patterning mold, then reduced to the Ag nanostructure by subsequent thermal annealing. More specifically, we present two methods: transfer printing and soft nanoimprinting. In transfer printing, the ionic Ag ink is first inked onto the elastomer mold which then contacts the target substrate to transfer the Ag nanopattern. In soft nanoimprinting, the elastomer mold conducts soft imprinting to engineer the ionic Ag ink coating to the Ag nanostructure. We systematically investigate the optimal patterning conditions by controlling the initial Ag ink concentration and the coating, printing, imprinting, and annealing conditions, to derive Ag architecture that has tunable photonic functionality. As an example, we demonstrate polarization-sensitive reflective color filters that exploit shape-tunable Ag nanostructures fabricated by soft nanoimprinting using a controllably-stretched elastomer mold.

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Tài liệu tham khảo

Y. X. Wang, F. Ren, and T. Ding, “Generation of high quality, uniform and stable plasmonic colorants via laser direct writing,” Adv. Opt. Mater., vol. 8, p. 2000164, 2020. https://doi.org/10.1002/adom.202000164.

C. S. H. Hwang, M. S. Ahn, Y. Lee, T. Chung, and K. H. Jeong, “Ag/Au alloyed nanoislands for wafer-level plasmonic color filter arrays,” Sci. Rep., vol. 9, p. 9082, 2019. https://doi.org/10.1038/s41598-019-45689-9.

J. S. Wi, J. D. Kim, W. Lee, et al.., “Inkjet-printable nanoporous Ag disk arrays enabling coffee-ring effect-driven analyte enrichment towards practical SERS applications,” Int. J. Precis. Eng. Manuf. - Green Technol., vol. 9, pp. 421–429, 2022. https://doi.org/10.1007/s40684-021-00351-6.

T. Lee, D. Jung, J. S. Wi, H. Lim, and J. J. Lee, “Surfactant-free galvanic replacement for synthesis of raspberry-like silver nanostructure pattern with multiple hot-spots as sensitive and reproducible SERS substrates,” Appl. Surf. Sci., vol. 505, p. 144548, 2020. https://doi.org/10.1016/j.apsusc.2019.144548.

T. Lee, S. Kwon, S. Jung, H. Lim, and J. J. Lee, “Macroscopic Ag nanostructure array patterns with high-density hotspots for reliable and ultra-sensitive SERS substrates,” Nano Res., vol. 12, pp. 2554–2558, 2019. https://doi.org/10.1007/s12274-019-2484-7.

N. H. Kim, W. Hwang, K. Baek, et al.., “Smart SERS hot spots: single molecules can be positioned in a plasmonic nanojunction using host-guest chemistry,” J. Am. Chem. Soc., vol. 140, pp. 4705–4711, 2018. https://doi.org/10.1021/jacs.8b01501.

S. S. Sukumaran, C. R. Rekha, A. N. Resmi, K. B. Jinesh, and K. G. Gopchandran, “Raman and scanning tunneling spectroscopic investigations on graphene-silver nanocomposites,” J. Sci., vol. 3, pp. 353–358, 2018. https://doi.org/10.1016/j.jsamd.2018.06.003.

J. Song, J. L. Long, Y. W. Liu, et al.., “Ivanov IN, McBride JR, losego MD, lian TQ. Highly efficient plasmon induced hot-electron transfer at Ag/TiO2 interface,” ACS Photonics, vol. 8, pp. 1497–1504, 2021. https://doi.org/10.1021/acsphotonics.1c00321.

X. P. Huang, K. Chen, M. X. Qi, et al.., “Plasmonic field guided patterning of ordered colloidal nanostructures,” Nanophotonics, vol. 8, pp. 505–512, 2019. https://doi.org/10.1515/nanoph-2018-0211.

A. Amirjani and D. F. Haghshenas, “Ag nanostructures as the surface plasmon resonance (SPR)˗based sensors: a mechanistic study with an emphasis on heavy metallic ions detection,” Sensor. Actuator. B Chem., vol. 273, pp. 1768–1779, 2018. https://doi.org/10.1016/j.snb.2018.07.089.

E. Kazuma and T. Tatsuma, “Localized surface plasmon resonance sensors based on wavelength-tunable spectral dips,” Nanoscale, vol. 6, pp. 2397–2405, 2014. https://doi.org/10.1039/c3nr05846h.

M. Kim, J. Mun, D. Bae, et al.., “Accordion-like plasmonic silver nanorod array exhibiting multiple electromagnetic responses,” NPG Asia Mater., vol. 10, pp. 190–196, 2018. https://doi.org/10.1038/s41427-018-0033-6.

S. B. Ulapane, N. J. B. Kamathewatta, A. K. Borkowski, S. J. Steuart, and C. L. Berrie, “Periodic silver and gold nanodot array fabrication on nanosphere lithography-based patterns using electroless deposition,” J. Phys. Chem. C, vol. 124, pp. 15646–15655, 2020. https://doi.org/10.1021/acs.jpcc.0c05247.

T. Lee, S. Jung, S. Kwon, et al.., “formation of interstitial hot-spots using the reduced gap-size between plasmonic microbeads pattern for surface-enhanced Raman scattering analysis,” Sensors, vol. 19, p. 1046, 2019. https://doi.org/10.3390/s19051046.

Z. Z. Wang, P. Y. Yi, L. F. Peng, X. M. Lai, and J. Ni, “Continuous fabrication of highly conductive and transparent Ag mesh electrodes for flexible electronics,” IEEE Trans. Nanotechnol., vol. 16, pp. 687–694, 2017. https://doi.org/10.1109/tnano.2017.2705173.

D. K. Oh, H. Jeong, J. Kim, et al.., “Top-down nanofabrication approaches toward single-digit-nanometer scale structures,” J. Mech. Sci. Technol., vol. 35, pp. 837–859, 2021. https://doi.org/10.1007/s12206-021-0243-7.

W. J. Joo, J. Kyoung, M. Esfandyarpour, et al.., “Metasurface-driven OLED displays beyond 10,000 pixels per inch,” Science, vol. 370, pp. 459–463, 2020. https://doi.org/10.1126/science.abc8530.

D. K. Oh, T. Lee, B. Ko, T. Badloe, J. G. Ok, and J. Rho, “Nanoimprint lithography for high-throughput fabrication of metasurfaces,” Front. Optoelectron., vol. 14, pp. 229–251, 2021. https://doi.org/10.1007/s12200-021-1121-8.

K. Kurematsu, S. Takei, S. Nakajima, et al.., “Comparison of gas permeable mold with acryl substituents for silver nano paste imprint patterning,” Microelectron. Eng., vol. 216, p. 111085, 2019. https://doi.org/10.1016/j.mee.2019.111085.

J. G. Ok, Y. J. Shin, H. J. Park, and L. J. Guo, “A step toward next-generation nanoimprint lithography: extending productivity and applicability,” Appl. Phys. Mater. Sci. Process, vol. 121, pp. 343–356, 2015. https://doi.org/10.1007/s00339-015-9229-6.

J. G. Ok, S. H. Ahn, M. K. Kwak, and L. J. Guo, “Continuous and high-throughput nanopatterning methodologies based on mechanical deformation,” J. Mater. Chem. C, vol. 1, pp. 7681–7691, 2013. https://doi.org/10.1039/c3tc30908h.

C. Zhang, H. Subbaraman, Q. C. Li, et al.., “Printed photonic elements: nanoimprinting and beyond,” J. Mater. Chem. C, vol. 4, pp. 5133–5153, 2016. https://doi.org/10.1039/c6tc01237j.

M. K. Kwak, J. G. Ok, S. H. Lee, and L. J. Guo, “Visually tolerable tiling (VTT) for making a large-area flexible patterned surface,” Mater. Horiz., vol. 2, pp. 86–90, 2015. https://doi.org/10.1039/c4mh00159a.

D. K. Oh, D. T. Nguyen, S. Lee, et al.., “Facile and scalable fabrication of flexible reattachable ionomer nanopatterns by continuous multidimensional nanoinscribing and low-temperature roll imprinting,” ACS Appl. Mater. Interfaces, vol. 11, pp. 12070–12076, 2019. https://doi.org/10.1021/acsami.8b21915.

J. S. Wi, S. Lee, S. H. Lee, et al.., “Facile three-dimensional nanoarchitecturing of double-bent gold strips on roll-to-roll nanoimprinted transparent nanogratings for flexible and scalable plasmonic sensors,” Nanoscale, vol. 9, pp. 1398–1402, 2017. https://doi.org/10.1039/c6nr08387k.

H. K. Na, J. S. Wi, H. Y. Son, J. G. Ok, Y. M. Huh, and T. G. Lee, “Discrimination of single nucleotide mismatches using a scalable, flexible, and transparent three-dimensional nanostructure-based plasmonic miRNA sensor with high sensitivity,” Biosens. Bioelectron., vol. 113, pp. 39–45, 2018. https://doi.org/10.1016/j.bios.2018.04.033.

S. H. Baek, H. W. Song, S. Lee, et al.., “Gold nanoparticle-enhanced and roll-to-roll nanoimprinted LSPR platform for detecting interleukin-10,” Front. Chem., vol. 8, p. 285, 2020. https://doi.org/10.3389/fchem.2020.00285.

W. Lee, H. Chae, D. K. Oh, et al.., “Solution-processable electrode-material embedding in dynamically inscribed nanopatterns (SPEEDIN) for continuous fabrication of durable flexible devices,” Microsyst. Nanoeng., vol. 7, p. 74, 2021. https://doi.org/10.1038/s41378-021-00307-5.

J. D. Kim, H. Choi, K. Kim, et al.., “Ionic solution-processable Ag nanostructures with tunable optical and electrical properties and strong adhesion to general substrates,” Appl. Mater. Today, 2022, in revision.

H. Choi, K. Kim, M. Kim, et al.., “Solution-processable Ag-mediated ZnO nanowires for scalable low-temperature fabrication of flexible devices,” ACS Appl. Electron. Mater., 2022. https://doi.org/10.1021/acsaelm.2c00035.

G. Yoon, K. Kim, D. Huh, H. Lee, and J. Rho, “Single-step manufacturing of hierarchical dielectric metalens in the visible,” Nat. Commun., vol. 11, p. 2268, 2020. https://doi.org/10.1038/s41467-020-16136-5.

K. Kim, G. Yoon, S. Baek, J. Rho, and H. Lee, “Facile nanocasting of dielectric metasurfaces with sub-100 nm resolution,” ACS Appl. Mater. Interfaces, vol. 11, pp. 26109–26115, 2019. https://doi.org/10.1021/acsami.9b07774.

V. J. Einck, M. Torfeh, A. McClung, et al.., “Scalable nanoimprint lithography process for manufacturing visible metasurfaces composed of high aspect ratio TiO2 meta-atoms,” ACS Photonics, vol. 8, pp. 2400–2409, 2021. https://doi.org/10.1021/acsphotonics.1c00609.

G. Yoon, K. Kim, S. U. Kim, S. Han, H. Lee, and J. Rho, “Printable nanocomposite metalens for high-contrast near-infrared imaging,” ACS Nano, vol. 15, pp. 698–706, 2021. https://doi.org/10.1021/acsnano.0c06968.

S. Heo, J. Lee, G. H. Lee, et al.., “Surface plasmon enhanced organic color image sensor with Ag nanoparticles coated with silicon oxynitride,” Sci. Rep., vol. 10, p. 219, 2020. https://doi.org/10.1038/s41598-019-57087-2.

D. K. Oh, W. Lee, H. Chae, et al.., “Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices,” Microelectron. Eng., vol. 257, p. 111740, 2022. https://doi.org/10.1016/j.mee.2022.111740.

M. K. Kwak, T.-i. Kim, P. Kim, H. H. Lee, and K. Y. Suh, “Large-area dual-scale metal transfer by adhesive force,” Small, vol. 5, pp. 928–932, 2009. https://doi.org/10.1002/smll.200801262.

S. Wu, Polymer Interface and Adhesion, 1st ed., Boca Raton, Routledge, 1982.

E. H. Ko, H. J. Kim, S. M. Lee, T. W. Kim, and H. K. Kim, “Stretchable Ag electrodes with mechanically tunable optical transmittance on wavy-patterned PDMS substrates,” Sci. Rep., vol. 7, p. 46739, 2017. https://doi.org/10.1038/srep46739.

V. Raj Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Polarization-tuned dynamic color filters incorporating a dielectric-loaded aluminum nanowire array,” Sci. Rep., vol. 5, p. 12450, 2015. https://doi.org/10.1038/srep12450.

H. Jia, Q. J. Wu, C. Jiang, et al.., “High-transmission polarization-dependent active plasmonic color filters,” Appl. Opt., vol. 58, pp. 704–711, 2019. https://doi.org/10.1364/ao.58.000704.

H. Yi, S.-H. Lee, H. Ko, et al.., “Ultra-adaptable and wearable photonic skin based on a shape-memory, responsive cellulose derivative,” Adv. Funct. Mater., vol. 29, p. 1902720, 2019. https://doi.org/10.1002/adfm.201902720.