Fabrication of block copolymer templates by using dually responsive photoresist bottom layers

Reactive and Functional Polymers - Tập 118 - Trang 20-25 - 2017
Kyoungok Jung1, Chang Hong Bak1, Se Jin Ku1, Jin-Baek Kim1
1Department of Chemistry, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-Ro, Yuseong, Daejeon 305-701, Republic of Korea

Tài liệu tham khảo

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