Fabrication of a high throughput apertured tip by the use of birds beak effect: a potential fabrication technique for near-field optical data storage
Tóm tắt
An optical recording device with an atomic force microscope (AFM) tip, having a sub wavelength aperture, has been considered as one of candidates for Th/in/sup 2/ data density in near-field optical storage technology. However, the low optical throughput of a near field aperture limits the practical use of the near-field optical storage technique. This limit can be avoided by the enhancement of the throughput of the near-field apertured tip and the development of new recording media with low phase change temperature. To increase the optical throughput of an AFM/near field apertured tip, several fabrication techniques have been proposed so far. In this paper we present a simple fabrication process of a near-field high throughput apertured tip using a bird's beak effect. Using the bird's beak effect and field oxidation, a higher throughput aperture and larger cone angled tip are fabricated, simultaneously.
Từ khóa
#Optical device fabrication #Throughput #Birds #Memory #Optical recording #Atom optics #Apertures #Atomic force microscopy #Optical microscopy #Optical devicesTài liệu tham khảo
pellerin, 2001, IEEE-NANO, 293
song, 2002, Jpn J Appl Phys, 41
park, 0, Appl Phys Lett
wolf, 1995, Silicon Processing for the VLSI Era vol 3- The Submicron MOSFET
10.1063/1.1304867
10.1063/1.116198