Fabrication of a high throughput apertured tip by the use of birds beak effect: a potential fabrication technique for near-field optical data storage

Ki-Bong Song1, Sung-Q Lee2,1, Junho Kim2,1, Jeongyong Kim2,1, Kang-Ho Park2,1
1Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, Korea
2Electronics and Telecommunications Research Institute, Basic Research Laboratory, Daejeon, South Korea

Tóm tắt

An optical recording device with an atomic force microscope (AFM) tip, having a sub wavelength aperture, has been considered as one of candidates for Th/in/sup 2/ data density in near-field optical storage technology. However, the low optical throughput of a near field aperture limits the practical use of the near-field optical storage technique. This limit can be avoided by the enhancement of the throughput of the near-field apertured tip and the development of new recording media with low phase change temperature. To increase the optical throughput of an AFM/near field apertured tip, several fabrication techniques have been proposed so far. In this paper we present a simple fabrication process of a near-field high throughput apertured tip using a bird's beak effect. Using the bird's beak effect and field oxidation, a higher throughput aperture and larger cone angled tip are fabricated, simultaneously.

Từ khóa

#Optical device fabrication #Throughput #Birds #Memory #Optical recording #Atom optics #Apertures #Atomic force microscopy #Optical microscopy #Optical devices

Tài liệu tham khảo

pellerin, 2001, IEEE-NANO, 293 song, 2002, Jpn J Appl Phys, 41 park, 0, Appl Phys Lett wolf, 1995, Silicon Processing for the VLSI Era vol 3- The Submicron MOSFET 10.1063/1.1304867 10.1063/1.116198