Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM
Tài liệu tham khảo
ISO 25178-6, 2010
ISO 25178-601, 2010
Vorburger, 1979, Measurements of stylus radii, Wear, 57, 39, 10.1016/0043-1648(79)90138-8
Haitjema, 1998, Uncertainty analysis of roughness standard calibration using stylus instruments, Precision Eng, 22, 110, 10.1016/S0141-6359(97)00090-1
Yoshida, 2006, Uncertainty of wavelength limitation due to stylus tip radius for engineering surface texture based on wavelength and amplitude by FFT, Wear, 261, 1225, 10.1016/j.wear.2006.03.006
ISO 25178-602, 2010
Garnaes, 2003, Calibration of step heights and roughness measurements with atomic force microscopes, Precision Eng, 27, 91, 10.1016/S0141-6359(02)00184-8
Maragliano, 2015, Effective AFM cantilever tip size: methods for in-situ determination, Meas. Sci. Technol., 26, 10.1088/0957-0233/26/1/015002
Jozwiak, 2017, Noise reduction by sparse representation in learned dictionaries for application to blind tip reconstruction problem, Meas. Sci. Technol., 28, 10.1088/1361-6501/aa4eb2
Marinello, 2009, Geometrical modelling of scanning probe microscopes and characterization of errors, Meas. Sci. Technol., 20, 10.1088/0957-0233/20/8/084013
Dai, 2004, Measurement of micro-roughness using a metrological large range scanning force microscope, Meas. Sci. Technol., 15, 2039, 10.1088/0957-0233/15/10/013
Koenders, 2013, Measurement of surface roughness by AFM EURAMET Project, REG. NO., 1239
Dziomba, 2013, Traceability for AFM roughness measurements, Nanoscale, 25
Dai, 2018, Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology, Meas. Sci. Technol., 29, 10.1088/1361-6501/aaaf8a
ISO 19606, 2017
Misumi, 2015, Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation”, Measurement, 73, 295, 10.1016/j.measurement.2015.05.026
Misumi, 2019, Extension of the range of profile surface roughness measurements using metrological atomic force microscope, Precision Eng, 56, 321, 10.1016/j.precisioneng.2019.01.002
Misumi, 2020, A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope, Meas. Sci. Technol., 31, 10.1088/1361-6501/ab8e69
ISO 25178-2, 2012
ISO 25178-70, 2014
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