Expanding the Allowable Limits of Axisymmetric Three-Dimensional Surfaces Curvature for Microstructure Recording

V. P. Kiryanov1
1Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

Tóm tắt

We analyze the operation of the system for automatic focusing of technological laser radiation on 3D optical surfaces, implemented in the optical recording head of the LGI-2 laser image generator. The reasons for considerable restrictions on the allowable inclination of the recording surface are discussed. We propose an alternative solution that makes it possible to significantly increase the allowable angle of inclination of axisymmetric surfaces for recording the topology of microstructures.

Tài liệu tham khảo

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