10.1080/00207179008934088
10.1080/00207178708933840
voorhoeve, 2018, Identifying position-dependent mechanical systems: A modal approach with applications to wafer stage control
o’reilly, 1983, Observers for Linear Systems
10.1016/S0005-1098(96)00141-0
chen, 2004, Linear Systems Theory A Structural Decomposition Approach
10.1109/TMECH.2009.2025772
10.1109/TCST.2016.2554060
10.1016/j.mechatronics.2014.03.008
10.1049/iet-cta.2013.0505
10.3182/20060912-3-DE-2911.00065
10.1109/TCST.2008.2002264
10.1016/j.automatica.2013.01.035
10.1016/S0967-0661(01)00166-6
10.1109/TCST.2014.2371830
10.1080/00207177608932805
10.1016/j.conengprac.2014.12.015
10.1109/TMECH.2016.2625309
10.1016/j.mechatronics.2017.09.010
rosenbrock, 1970, State-Space and Multivariable Theory
10.1109/TSMC.2015.2505687
10.1049/iet-cta.2011.0394
10.1109/TMECH.2018.2792618
10.1109/TMECH.2017.2682283
10.1016/j.mechatronics.2014.07.003
10.1016/j.mechatronics.2017.05.009
10.1109/TCST.2019.2903021
athans, 1966, Optimal Control An Introduction to the Theory and Its Application
10.1016/j.mechatronics.2011.12.006
10.1109/TMECH.2018.2796500
10.23919/ACC.2018.8431688