Electron beam damage in Auger electron spectroscopy

Chang, 1974, Analytical Auger electron spectroscopy, 550 Brundle, 1974, The application of electron spectroscopy to surface studies, J. Vacuum Sci. Technol., 11, 212, 10.1116/1.1318572 Thomas, 1974, Electron-irradiation effect in the Auger analysis of SiO2, J. Appl. Phys., 45, 161, 10.1063/1.1662951 Coad, 1975, Beam effects in AES revealed by XPS, Discuss. Faraday Soc., 60, 269, 10.1039/DC9756000269 van Oostrom, 1979, Some aspects of Auger microanalysis, Surface Sci., 89, 615, 10.1016/0039-6028(79)90643-5 Ohuchi, 1980, Electron beam effects during analysis of glass thin films with Auger electron spectroscopy, Surface Interface Anal., 2, 85, 10.1002/sia.740020303 Palmberg, 1968, Surface dissociation of potassium chloride by low energy electron bombardment, J. Phys. Chem. Solids, 29, 1917, 10.1016/0022-3697(68)90041-3 Musket, 1970, Auger electron spectroscopy study of electron impact desorption, Surface Sci., 21, 440, 10.1016/0039-6028(70)90245-1 Tokutaka, 1970, (100) surface of alkali halides. II. Electron stimulated dissociation, Surface Sci., 21, 233, 10.1016/0039-6028(70)90230-X Chang, 1971, Silicon on sapphire epitaxy by vacuum sublimation-LEED-Auger studies and electronic properties of films, J. Vacuum Sci. Technol., 8, 500, 10.1116/1.1314585 Madden, 1973, Decomposition of carbon monoxide on a (110) nickel surface, Surface Sci., 35, 211, 10.1016/0039-6028(73)90215-X Hooker, 1976, Auger electron spectroscopy studies of CO on Ni: Spectral line shapes and quantitative aspects, Surface Sci., 55, 741, 10.1016/0039-6028(76)90277-6 Fuggle, 1977, Electron induced dissociation of CO on Ru (001), Surface Sci., 64, 69, 10.1016/0039-6028(77)90258-8 Sasaki, 1978, Radiation damage studies by X-ray photoelectron spectroscopy. I. Electron irradiated LiNO3 and Li2SO4, J. Chem. Phys., 68, 2718, 10.1063/1.436109 Sasaki, 1978, Radiation damage studies by X-ray photoelectron spectroscopy. II. Electron irradiated Li2CrO4 and Li2WO4, J. Chem. Phys., 69, 4374, 10.1063/1.436448 Holloway, 1979, Electron spectroscopy of condensed multilayers: Line shape changes due to beam damage and excitation mode, Surface Sci., 88, 121, 10.1016/0039-6028(79)90571-5 Coad, 1970, Electron-beam assisted adsorption on the Si (111) surface, Surface Sci., 21, 253, 10.1016/0039-6028(70)90232-3 Martinez, 1973, The adsorption and decomposition of CO on Pt (111), J. Vacuum Sci. Technol., 10, 35, 10.1116/1.1318038 Joyce, 1973, Electron beam-adsorbate interactions on silicon surfaces, Surface Sci., 34, 401, 10.1016/0039-6028(73)90126-X Taylor, 1973, Carbon monoxide adsorption on Ni (110), J. Vacuum Sci. Technol., 10, 26, 10.1116/1.1317970 Kirby, 1974, Electron beam induced effects on gas adsorption utilizing Auger electron spectroscopy: CO and O2 on Si. I. Adsorption studies, Surface Sci., 41, 447, 10.1016/0039-6028(74)90061-2 Kirby, 1974, Electron beam induced effects on gas adsorption utilizing Auger electron spectroscopy: CO and O2 on Si. II. Structural effects, Surface Sci., 41, 467, 10.1016/0039-6028(74)90062-4 Carriere, 1977, A study of the charging and dissociation of SiO2 surfaces by AES, Surface Sci., 64, 209, 10.1016/0039-6028(77)90267-9 Tompkins, 1977, The electron stimulated interaction of H2O with a nickel surface, Surface Sci., 62, 293, 10.1016/0039-6028(77)90444-7 Forty, 1963, The chemical effects of ionizing radiation on non-metallic crystals, Br. J. Appl. Phys., 14, 3, 10.1088/0508-3443/14/1/302 Lehman, 1977 Field, 1970 Mosiewiksch, 1968, Electron impact excitation of atoms, Rev. Mod. Phys., 40, 1 Isaacson, 1977, Specimen damage in the electron microscope, Vol. 7, 1 Chou, 1973, Auger analysis of chlorine in HCl or Cl2-grown SiO2 films, Appl. Phys. Letters, 22, 380, 10.1063/1.1654681 Johnson, 1974, Composition of Pt anode surfaces by Auger spectroscopy, J. Electrochem. Soc., 121, 34, 10.1149/1.2396826 Chappell, 1974, An Auger electron spectroscopy study of float glass surfaces, Phys. Chem. Glasses, 15, 130 Pantano, 1975, AES analysis of sodium in a corroded bioglass using a low-temperature technique, Appl. Phys. Letters, 26, 601, 10.1063/1.88017 Stoddart, 1975, Determination of the surface composition of palladium-nickel alloy film catalysts using Auger electron spectroscopy, Surface Sci., 53, 241, 10.1016/0039-6028(75)90127-2 Ahn, 1975, Electron-beam effects in depth profiling measurements with Auger electron spectroscopy, J. Appl. Phys., 46, 4581, 10.1063/1.321398 Pantano, 1976, AES compositional profiles of mobile ions in the surface region of glass, J. Vacuum Sci. Technol., 13, 414, 10.1116/1.568934 Szklarska-Śmiałowska, 1976, Electron spectroscopy analysis of in-depth profiles of iron in Cl-containing solutions, Corros. Sci., 16, 649, 10.1016/S0010-938X(76)80024-8 Ellis, 1977, Electron-beam decomposition of UF4 optical interference layers, J. Vacuum Sci. Technol., 14, 1316, 10.1116/1.569380 Mathieu, 1977, Beam effects in Auger electron spectroscopy analysis of titanium oxide films, J. Vacuum Sci. Technol., 14, 1023, 10.1116/1.569313 Madey, 1977, Surface characterization of catalysts using electron spectroscopies: Results of a round-robin sponsored by ASTM committee D-32 on catalysts, J. Electron Spectry. Relat. Phenom., 10, 359, 10.1016/0368-2048(77)85033-0 Dawson, 1978, Glass surface analysis by Auger electron spectroscopy, J. Phys. C, 11, 2183, 10.1088/0022-3719/11/11/011 Ohuchi, 1979, Effect of crystallization on the Auger electron signal decay in a Li2O-2SiO2 glass and glass-ceramic, J. Am. Ceram. Soc., 62, 500, 10.1111/j.1151-2916.1979.tb19115.x Pantano, 1980, Surface studies of the Medicus nickel matrix cathode, Appl. Surface Sci., 4, 385, 10.1016/0378-5963(80)90086-0 Burstein, 1980, Effects of electron bombardment during Auger electron analysis of corroded metal surfaces, Mat. Sci. Eng., 42, 207, 10.1016/0025-5416(80)90030-0 Copperthwaite, 1980, The study of radiation-induced chemical damage at solid surfaces using photoelectron spectroscopy, Surface Interface Anal., 10.1002/sia.740020105 Madey, 1977, Desorption methods as probes of kinetics and bonding at surfaces, Surface Sci., 63, 203, 10.1016/0039-6028(77)90339-9 Madey, 1971, Electron stimulated desorption as a tool for studies of chemisorption: A review, J. Vacuum Sci. Technol., 8, 525, 10.1116/1.1315200 Menzel, 1975, Desorption methods, Vol. 4, 101 Knotek, 1978, Ion desorption by core-hole Auger decay, Phys. Rev. Letters, 40, 964, 10.1103/PhysRevLett.40.964 Goldstein, 1975, Electron beam - specimen interaction, 49 Franchy, 1979, Adsorbate core ionization as primary process in electron - and photon-stimulated desorption from metal surfaces, Phys. Rev. Letters, 43, 865, 10.1103/PhysRevLett.43.865 J.E. Houston and T.E. Madey, Core hole excitations in ESD of CO on W(110), Surface Sci., to be published. Clark, 1979, Corrosion of Glass, 60 C.L. Strecker and W.E. Moddeman, private communication. Y.E. Strausser and J.S. Johannessen, An Auger electron spectroscopy study of silicon spectra from silicon monoxide, silicon dioxide and silicon nitride, in: Surface Analysis for Silicon Devices (NBS Special Publ. 400-23) p. 125. Buchholz, 1977, The surface structures of phthalocyanine monolayers and vapor-grown films: A low energy electron diffraction study, J. Chem. Phys., 66, 573, 10.1063/1.433979 Musket, 1978, Studies of clean and oxidized tellurium surfaces, Surface Sci., 74, 423, 10.1016/0039-6028(78)90037-7 Madey, 1978, The adsorption of cycloparaffins on Ru(001) as studied by temperature programmed desorption and electron stimulated desorption, Surface Sci., 76, 397, 10.1016/0039-6028(78)90105-X Knapp, 1977, The effect of electron bombardment on evaporated films of sodium aluminum fluoride, 2161 Egerton, 1979, 514 Thompson, 1976, Polymer resistivity systems for photo- and electron lithography, Ann. Rev. Mat. Sci., 6, 267, 10.1146/annurev.ms.06.080176.001411 Thompson, 1978, Negative electron resists for direct fabrication of devices, J. Vacuum Sci. Technol., 15, 938, 10.1116/1.569680 Lang, 1972, Charging of insulators in LEED studies, Surface Sci., 32, 473, 10.1016/0039-6028(72)90175-6 Lineweaver, 1963, Oxygen outgassing caused by electron bombardment of glass, J. Appl. Phys., 34, 1786, 10.1063/1.1702680 Fine, 1978, Visual ion-beam images produced by electron and ion-beam interaction on surfaces, J. Appl. Phys., 49, 1236, 10.1063/1.325012 Varshneya, 1966, Changes in composition during electron microprobe analysis of K2O-SrO-SiO2 glass, J. Appl. Phys., 37, 2199, 10.1063/1.1708778 Borom, 1967, Local compositional changes in alkali silicate glasses during electron microprobe analysis, J. Appl. Phys., 38, 2406, 10.1063/1.1709908 Vassamillet, 1969, Electron-probe microanalysis of alkali metals in glasses, J. Appl. Phys., 40, 1637, 10.1063/1.1657825 Hayami, 1970, Compositional changes during electron microprobe analysis of alkali silicate glasses, Yogyo Kyokai Shi, 78, 138, 10.2109/jcersj1950.78.896_138 Goodhew, 1974, The determination of alkali metals in glasses by electron probe microanalysis, Glass Tech., 15, 123 McCaughan, 1973, Ion neutralization processes at insulation surfaces and consequent impurity migration effects in SiO2 films, Phys. Rev. Letters, 30, 614, 10.1103/PhysRevLett.30.614 Pittaway, 1964, The temperature distributions in thin foil and semi-infinite targets bombarded by an electron beam, Br. J. Appl. Phys., 15, 967, 10.1088/0508-3443/15/8/314 Holloway, 1977, Surface sensitive techniques and evolution, 236 Ducharme, 1973, Consideration of L-shell ionization cross sections in Auger electron spectroscopy, J. Vacuum Sci. Technol., 10, 188, 10.1116/1.1317935