Electrochemical behaviors of silicon wafers in silica slurry

Journal of University of Science and Technology Beijing, Mineral, Metallurgy, Material - Tập 15 - Trang 495-499 - 2008
Xiaolan Song1, Haiping Yang1, Xunda Shi2, Xi He1, Guanzhou Qiu1
1Department of Inorganic Materials, School of Minerals Processing and Bioengineering, Central South University, Changsha 410083, China
2Silicon Wafer Manufacture Department, Grinm Semiconductor Materials Co. Ltd., Beijing 100088, China

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Journal of University of Science and Technology Beijing, Mineral, Metallurgy, Material

Tập 15

495-499

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