Electrically isolated nanostructures fabricated using self-assembled multilayers and a novel negative-tone bi-layer resist stack

Microelectronic Engineering - Tập 83 - Trang 1517-1520 - 2006
Charan Srinivasan1, Mary E. Anderson2, R. Jayaraman1, Paul S. Weiss2, Mark W. Horn1
1Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA 16802 USA
2Departments of Chemistry and Physics, The Pennsylvania State University, University Park, PA 16802, USA

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