Electrical properties and defect model of tin-doped indium oxide layers

Applied Physics A Solids and Surfaces - Tập 27 Số 4 - Trang 197-206 - 1982
Gerhard Frank1, H. Köstlin1
1Philips GmbH Forschungslaboratorium Aachen, Aachen, Fed. Rep. Germany

Tóm tắt

Từ khóa


Tài liệu tham khảo

D.B.Frazer: Proc. IEEE61, 1013?1018 (1973)

R.R.Mehta, S.F.Vogel: J. Electochem. Soc.119, 752?756 (1972)

J.B.DuBow, D.E.Burk: Appl. Phys. Lett.29, 494?496 (1976)

H.J.J. van Boort, R.Groth: Philips Techn. Rev.29, 17?18 (1968)

J.C.C.Fan, F.J.Bachner: Appl. Opt.15, 1012?1017 (1976)

S.Yoshida: Appl. Opt.17, 145?150 (1978)

H.K östlin: Philips Techn. Rev.34, 242?243 (1974)

J.A.Thornton, V.L.Hedgcoth: J. Vac. Sci. Technol.13, 117?121 (1976)

H.W.Lehmann, R.Widmer: Thin Solid Films27, 359?368 (1975)

D.B.Frazer, H.D.Cook: J. Electrochem. Soc.119, 1368?1374 (1972)

J.C.C.Fan, F.J.Bachner: J. Electrochem. Soc.122, 1719?1725 (1975)

P.Nath, R.F.Bunshah: Thin Solid Films69, 63?68 (1980)

J.Kane, H.P.Schweizer, W.Kern: Thin Solid Films29, 155?163 (1975)

D.K.Ranadive, F.T.J.Smith, R.P.Khosla: Proc. 6th Intern. Conf. Chemical Vapor Deposition 1977 (The Electrochem. Soc. 1978) pp. 448?460

R.Groth: Phys. stat. sol.14, 69?75 (1966)

A.Raza, O.P.Agnihotri, B.K.Gupta: J.Phys. D (Appl. Phys.)10, 1871?1876 (1977)

J.C.Manifacier, M.de Murcia, U.P.Fillard: Mater. Res. Bull.10, 1215?1220 (1975)

J.L.Vossen: RCA Rev.32, 289?296 (1971)

J.M.Pankratz: J. Electron. Mater.1, 1?9 (1972)

W.G.Haines, R.H.Bube: J. Appl. Phys.49, 304?307 (1978)

G.Frank, E.Kauer, H.Köstlin: Thin Solid Films77, 107?117 (1981)

O.P.Agnihotri, A.K.Sharma, B.K.Gupta, R.Thangaraj: J. Phys. D (Appl. Phys.)11, 643?647 (1978)

H.Hoffmann, J.Pickl, M.Schmidt: Appl. Phys.16, 239?246 (1978)

V.M.Vainshtein, V.I.Fistul: Sov. Phys. Semicond.4, 1278?1281 (1971)

J.L. van der Pauw: Philips Res. Rep.13, 1?9 (1958)

R.Clanget: Appl. Phys.2, 247?256 (1973)

G.Frank, H.Köstlin, A.Rabenau: Phys. stat. sol. (a)52, 231?238 (1979)

J.H.W. de Wit: J. Solid State Chem.20, 143?148 (1977)

J.H.W. de Wit, G. van Unen, M.Lahey: J. Phys. Chem. Solids38, 819?824 (1977)

M.Hecq, A.Dubois, J. van Cakenberghe: Thin Solid Films18, 117?125 (1973)

H.Köstlin, R.Jost, W.Lems: Phys. stat. sol. (a)29, 87?93 (1975)

E.C.Subbarao, P.H.Sutter, J.Hrizo: J. Am. Ceram. Soc.48, 443?446 (1965)

D.J.McDowell, R.W.Scheidecker, M.F.Berard: J. Solid State Chem.23, 357?360 (1978)

J.C.C.Fan, J.B.Goodenough: J. Appl. Phys.48, 3524?3531 (1977)

F.A.Kröger:The Chemistry of Imperfect Crystals, Vol. 2, (North-Holland, Amsterdam 1974) pp. 690?694

D.Chatterji, R.W.Vest: J. Am. Ceram. Soc.55, 575?578 (1972)

R.L.Weiher: J. Appl. Phys.33, 2834?2839 (1962)

J.E.Morris, M.I.Ridge, C.A.Bishop, R.A.Howson: J. Appl. Phys.51, 1847?1849 (1980)

V.F.Korzo, V.N.Chernyaev: Phys. stat. sol. (a)20, 695?705 (1973)

H.K.Müller: Phys. stat. sol.27, 723?731, 733?740 (1968)

R.B.Dingle: Philos. Mag.46, 831?840 (1955)

C.Erginsoy: Phys. Rev.79, 1013?1014 (1950)

H.Koch: Phys. stat. sol.3, 1059?1071, 1619?1628 (1963);7, 263?275 (1964)