Electrical passivation by hydrogen plasma treatment of transition metal impurities in germanium

Materials Science in Semiconductor Processing - Tập 11 - Trang 360-363 - 2008
J. Lauwaert1, J. Van Gheluwe1, P. Clauws1
1Department of Solid State Sciences, Ghent University, Krijgslaan 281-S1, B-9000 Gent, Belgium

Tài liệu tham khảo

Simoen, 2007, Metals in germanium Clauws, 2006, Metals in germanium, Mater Sci Semicond Proc, 9, 546, 10.1016/j.mssp.2006.08.047 Clauws, 2007, Deep level transient spectroscopy of transition metal impurities in germanium, Physica B, 401, 188, 10.1016/j.physb.2007.08.143 Pearton, 1983, Hydrogen passivation of deep metal related donor centers in germanium, J Appl Phys, 54, 820, 10.1063/1.332041 Pearton, 1982, Deep metal-related centres in germanium, Solid-State Electron, 25, 305, 10.1016/0038-1101(82)90139-3 Tyler, 1959, Deep level impurities in germanium, J Phys Chem Solids, 8, 59, 10.1016/0022-3697(59)90274-4 Haller, 1979, Deep level transient spectroscopy of high-purity germanium diodes-detectors, IEEE Trans Nucl Sci, NS-26, 265, 10.1109/TNS.1979.4329643 Simoen, 1986, Signature and capture cross section of copper-related hole traps in p-type high-purity germanium, Semicond Sci Technol, 1, 53, 10.1088/0268-1242/1/1/007 Clauws, 1989, DLTS of the third acceptor level of substitutional copper in germanium, Semicond Sci Technol, 4, 910, 10.1088/0268-1242/4/11/003 Haller, 1977, Hydrogen–multivalent acceptor complexes in high-purity germanium, IEEE Trans Nucl Sci, 24, 48, 10.1109/TNS.1977.4328641 Kahn, 1986, Isotope-induced symmetry change in dynamic semiconductor defects, Phys Rev Lett, 57, 2077, 10.1103/PhysRevLett.57.2077 Lauwaert, 2007, Electrical passivation by hydrogen of substitutional cobalt in monocrystalline germanium, Physica B, 401, 210, 10.1016/j.physb.2007.08.148 Lauwaert, 2006, Hydrogen-plasma-induced plate-like cavity clusters in single-crystalline germanium, Mater Sci Semicond Proc, 9, 571, 10.1016/j.mssp.2006.08.049 Fage-Pedersen, 2000, Irradiation-induced defects in Ge studied by transient spectroscopies, Phys Rev B, 62, 10116, 10.1103/PhysRevB.62.10116