Effect of friction cycles on wear particle generation of carbon nitride coating against a spherical diamond

Tribology International - Tập 33 - Trang 115-122 - 2000
Dong F Wang1, Koji Kato1
1Laboratory of Tribology, School of Mechanical Engineering, Tohoku University, Sendai 980-8579, Japan

Tài liệu tham khảo

Menz W, Bacher W, Mohr J. Microsystems technology evolution and future development, Int. Conf. on Micromechatronics for Information and Precision Equipment Proc., July 20–23, Tokyo, Japan, 1997;1–6. Muller, 1990, Microdynamics, Sensors and actuators, A21/23, 1 Tai, 1990, Frictional study of IC-processed micromotors, Sensors and Actuators, A21/23, 180 Gabriel, 1990, In situ friction and wear measurements' in integrated polysilicon mechanisms, Sensors and Actuators, A21/23, 184, 10.1016/0924-4247(90)85035-3 Mehregany M, Senturia SD, Lang JH. Friction and wear in microfabricatcd harmonic side-drive motors, MEMS'90. IEEE, 1990:17–22. Hirano T, Furuhata T, Fujita H. Dry released nickel micromotors and their friction characteristics, Transducers'96. IEEE, 1996:80–83. Kancko R. Microtribology related to MEMS-concept, measurements, applications, MEMS'91. IEEE, 1991:1–8. Beerschwinger U, Mathieson D, Reuben RL, Yang SJ, Dhariwal RS, Ziad H. Tribology measurements for MEMS applications, Micro Systems Technologies'94. Berlin Oct, 1994:19–21. Beerschwinger, 1994, A study of wear on MEMS contact morphologies, J. Micromech. Microeng., 4, 95, 10.1088/0960-1317/4/3/001 Houston, 1995, Diamond-like carbon films for silicon passivation in microelectromechanical devices, Mat. Res. Sot. Symp. Proc., 383, 391, 10.1557/PROC-383-391 Sundararajan, 1998, Micro/nanotribological studies of polysilicon and Sic films for MEMS applications, Wear, 217, 251, 10.1016/S0043-1648(98)00169-0 Komvopoulos, 1996, Surface engineering and microtribology for microelectromechanical systems, Wear, 200, 305, 10.1016/S0043-1648(96)07328-0 Alley RL, Mai P, Komvopoulos K, Howe RT. Surface roughness modification of interfacial contacts in polysilicon microstructures, Transducers'93. 1993:288–291. Trojan, 1994, Network modification of DLC coatings to adjust a defined surface energy, Phys. Stat. Sol. A, 145, 575, 10.1002/pssa.2211450242 Deng K, Collins RJ, Mehregany M, Sukenik CN, Performance impact of monolayer coating of polysilicon micromotors, MEMS'95. IEEE, 1995:368–373. Shimizu N, Asai K, Aoki S, Shibaike N. Mechanical planetary gears for a micro-reducer, The 4th Inter. Micromachines Symp., Oct. 29–30. Tokyo, Japan, 1998:177–181. Suzuki S, Matsuura T, Uchizawa M, Yura S, Shibata H. Friction and wear studies on lubricants and materials applicable to MEMS, MEMS'91. IEEE, 1991:143–147. Deng K, Ko WH. Application of diamond-like carbon film for microdynamic devices, MEMS'92. IEEE, 1992:98–101. Deng, 1992, Static friction of diamond-like carbon film in MEMS, Sensors and Actuators, A35, 45, 10.1016/0924-4247(92)87006-3 Grill, 1997, Tribology of diamondlike carbon and related materials: an updated review, Surface and Coatings Tech., 94/95, 507, 10.1016/S0257-8972(97)00458-1 Chen, 1993, Synthesis and tribological properties of carbon nitride as a novel superhard coating and solid lubricant, Trib. Trans., 36, 491, 10.1080/10402009308983188 Prioli, 1996, Atomic force microscopy of amorphous hydrogenated carbon-nitrogen film deposited by radio-frequency-plasma decomposition of methane-ammonia gas mixtures, J. Vat. Sci. Technol., A14, 2351, 10.1116/1.580021 Koskinen, 1996, Tribological characterization of carbon-nitrogen coatings deposited by using vacuum arc discharge, Diamond and Related Mat., 5, 669, 10.1016/0925-9635(95)00382-7 Cutiongco, 1996, Tribological behavior of amorphous carbon nitride overcoats for magnetic thin-film regid disks, J. Tribo., I18, 543, 10.1115/1.2831572 Khurshudov, 1996, Microtribological characterization of carbon nitride coatings, Tribo. Lett., 2, 13 Hajek, 1997, Tribological study of CNx films prepared by reactive d.c. magnetron sputtering, Wear, 213, 80, 10.1016/S0043-1648(97)00176-2 Czyniewski, 1998, Structure, composition and tribological properties of carbon nitride films, Thin Solid Films, 317, 384, 10.1016/S0040-6090(97)01056-0 Wang, 1998, Friction studies of ion beam assisted carbon nitride coating sliding against diamond pin in water vapor, Wear, 217, 307, 10.1016/S0043-1648(98)00144-6 Wang DF, Kato K. Thickness effect on friction variations and surface damage mode transitions of carbon nitride coating sliding against diamond, Proceedings of the 1st Asia Int. Conf. on Tribology (ASIATRIB'98), Volume II. Beijing, China: Tsinghua University Press, 1998:640–645. Wang, 1998, A comparison of tribological characteristics of sputter-coatings of carbon with and without nitrogen incorporation, 435 Wang, 1999, Effect of coating thickness on friction variations in sliding between CNO.1 coated Si(111) and a diamond pin, Wear, 224, 111, 10.1016/S0043-1648(98)00343-3 Fujita H. A decade of MEMS and its future, MEMS'97. IEEE, 1997:1–8. Stachowiak, 1997, Numerical characterization of wear particle morphology and angularity of particles and surfaces, 371 Stachowiak, 1998, Particle angularity and its relationship to abrasive and erosive wear, 465 Doerner, 1986, A method for interpreting the data from depth-sensing indentation instruments, J. Mat. Res., 1, 601, 10.1557/JMR.1986.0601 Yamagishi H. The R&D trend of measuring technologies for micromachines, The 4th Inter. Micromachines Symp., Oct. 29–30, Tokyo, Japan, 1998:205–210. Paratte, 1991, Design of an integrated electrostatic stepper motor with axial field, Sensors and Actuators, A25/27, 597, 10.1016/0924-4247(91)87057-A Miyoshi, 1992, Friction and wear of diamond and diamondlike carbon coatings, Surf. Coatings Technology, 54/55, 428, 10.1016/S0257-8972(07)80061-2