Effect of Hydrogen Heat Treatment on the Chemical Composition of Aluminum Nitride Powder
Tóm tắt
The effect of hydrogen heat treatment on impurity contents in aluminum nitride powder of different fineness is studied. Thermodynamic calculations are provided pointing to the possibility of forming gaseous hydrogen compounds with impurity elements. It is established that as a result of treatment the contents of impurity elements, i.e. oxygen, carbon, sulfur, are reduced by a factor of 3-13. The optimum hydrogen heat treatment regime is determined: a temperature of 1323 K and an exposure time of 30 min.
Tài liệu tham khảo
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