EXTENDED DEFECTS IN GaAs/Ge/GaAs HETEROSTRUCTURES WITH TURNING GaAs LAYERS

Bulletin of the Lebedev Physics Institute - Tập 47 - Trang 365-370 - 2021
I. P. Kazakov1, S. A. Zinov’ev1, A. V. Klekovkin1, V. A. Sazonov2, V. N. Kukin3, N. I. Borgardt3
1Lebedev Physical Institute, Russian Academy of Sciences, Moscow, Russia
2National Research University of Electronic Technology — MIET, Zelenograd, Russia
3National Research University of Electronic Technology (MIET), Zelenograd, Russia

Tóm tắt

The GaAs layer turn on Ge at a right angle in the substrate plane was studied by high-energy electron diffraction and transmission electron microscopy methods when growing GaAs/Ge/GaAs heterostructures using individual molecular-beam epitaxy systems for GaAs and Ge, with sample transfer through atmosphere.

Tài liệu tham khảo

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