Dislocations in strained-layer epitaxy: theory, experiment, and applications

Materials Science Reports - Tập 7 Số 3 - Trang 87-142 - 1991
Eugene A. Fitzgerald1
1AT&T Bell Laboratories, Murray Hill, NJ 07974, USA

Tóm tắt

Từ khóa


Tài liệu tham khảo

Frank, 1949, 198, 205

Frank, 1949, 198, 216

Frank, 1949, 200, 125

Frank, 1949, 201, 261

van der Merwe, 1963, J. Appl. Phys., 34, 117, 10.1063/1.1729050

van der Merwe, 1963, J. Appl. Phys., 34, 123, 10.1063/1.1729051

Jesser, 1967, Phys. Stat. Sol., 19, 95, 10.1002/pssb.19670190110

Jesser, 1967, Phil. Mag., 15, 1097, 10.1080/14786436708222752

Jesser, 1968, Phil. Mag., 17, 461, 10.1080/14786436808217735

Jesser, 1968, Phil. Mag., 17, 595, 10.1080/14786436808217745

Matthews, 1970, J. Appl. Phys., 41, 3800, 10.1063/1.1659510

Matthews, 1970, Thin Solid Films, 5, 187, 10.1016/0040-6090(70)90076-3

Haasen, 1957, Acta Metall., 5, 598, 10.1016/0001-6160(57)90129-3

Fitzgerald, 1989, J. Vacuum Sci. Technol. B, 7, 782, 10.1116/1.584600

Abrahams, 1972, Appl. Phys. Letters, 21, 185, 10.1063/1.1654336

Esaki, 1970, IBM J. Res. Develop., 14, 61, 10.1147/rd.141.0061

Matthews, 1974, J. Crystal Growth, 27, 118

Cherns, 1973, Scripta Metall., 7, 489, 10.1016/0036-9748(73)90101-4

Yagi, 1971, J. Crystal Growth, 9, 84, 10.1016/0022-0248(71)90214-4

Matthews, 1975, J. Vacuum Sci. Technol., 12, 126, 10.1116/1.568741

Matthews, 1976, Thin Solid Film, 33, 253, 10.1016/0040-6090(76)90085-7

Matthews, 1975

Hagen, 1978, Appl. Phys., 17, 85, 10.1007/BF00885035

Strunk, 1979, Appl. Phys., 18, 67, 10.1007/BF00935905

People, 1985, Appl. Phys. Letters, 47, 322, 10.1063/1.96206

People, 1986, Appl. Phys. Letters, 49, 229, 10.1063/1.97637

Gilmer, 1987, J. Met., 39, 19

Fritz, 1987, Appl. Phys. Letters, 51, 1080, 10.1063/1.98746

Dodson, 1987, Appl. Phys. Letters, 51, 1325, 10.1063/1.98667

Dodson, 1988, Appl. Phys. Letters, 52, 852, 10.1063/1.99658

Dodson, 1988, Appl. Phys. Letters, 53, 37, 10.1063/1.100115

Jesser, 1968, Phil. Mag., 17, 475, 10.1080/14786436808217736

Abrahams, 1969, J. Mater. Sci., 4, 223, 10.1007/BF00549922

Abrahams, 1975, J. Appl. Phys., 46, 4259, 10.1063/1.321409

Matthews, 1977, J. Vacuum Sci. Technol., 14, 989, 10.1116/1.569409

Orders, 1987, Appl. Phys. Letters, 50, 980, 10.1063/1.98004

Fritz, 1987, Appl. Phys. Letters, 51, 1004, 10.1063/1.98984

Matthews, 1979, Vol. 2, 503

Hirth, 1982

Adachi, 1982, J. Appl. Phys., 53, 8775, 10.1063/1.330480

Reimer, 1984

Kohama, 1988, Appl. Phys. Letters, 52, 380, 10.1063/1.99472

Salih, 1985, Appl. Phys. Letters, 46, 419, 10.1063/1.95598

Hull, 1988, Appl. Phys. Letters, 52, 1605, 10.1063/1.99055

Bielgelsen, 1988, J. Appl. Phys., 61, 1856, 10.1063/1.338029

Ishida, 1987, Japan. J. Appl. Phys., 26, L163, 10.1143/JJAP.26.L163

Cullity, 1978, Elements of X-ray Diffraction, 268

Petroff, 1978, J. Crystal Growth, 43, 628, 10.1016/0022-0248(78)90052-0

Yamazaki, 1982, J. Appl. Phys., 53, 4761, 10.1063/1.331305

Komiya, 1983, J. Crystal Growth, 61, 362, 10.1016/0022-0248(83)90373-1

Yamazaki, 1983, J. Appl. Phys., 55, 3478, 10.1063/1.332957

Gourley, 1988, Appl. Phys. Letters, 52, 377, 10.1063/1.99471

Orders, 1987, Appl. Phys. Letters, 50, 980, 10.1063/1.98004

Lum, 1987, Appl. Phys. Letters, 51, 36, 10.1063/1.98878

Fritz, 1985, Appl. Phys. Letters, 46, 987, 10.1063/1.95783

Anderson, 1987, Appl. Phys. Letters, 51, 752, 10.1063/1.98856

Gourley, 1985, Appl. Phys. Letters, 47, 482, 10.1063/1.96099

Das, 1985, J. Appl. Phys., 58, 341, 10.1063/1.335682

Gal, 1987, J. Appl. Phys., 62, 3898, 10.1063/1.339236

Gal, 1988, Appl. Phys. Letters, 53, 113, 10.1063/1.100385

Kato, 1986, J. Appl. Phys., 59, 588, 10.1063/1.336617

Kato, 1986, Japan. J. Appl. Phys., 25, 1327, 10.1143/JJAP.25.1327

Asai, 1983, J. Appl. Phys., 54, 2052, 10.1063/1.332252

Enatsu, 1987, Japan. J. Appl. Phys., 26, L1468, 10.1143/JJAP.26.L1468

Picraux, 1983, Appl. Phys. Letters, 43, 930, 10.1063/1.94184

Picraux, 1983, Appl. Phys. Letters, 43, 1020, 10.1063/1.94214

Chami, 1987, J. Appl. Phys., 62, 3718, 10.1063/1.339254

Hishida, 1987, J. Appl. Phys., 62, 4460, 10.1063/1.339034

Leamy, 1982, J. Appl. Phys., 53, R51, 10.1063/1.331667

Shinohara, 1985, Japan. J. Appl. Phys., 24, L711, 10.1143/JJAP.24.L711

Shinohara, 1985, Japan. J. Appl. Phys., 24, L818, 10.1143/JJAP.24.L818

Ito, 1986, Japan. J. Appl. Phys., 25, L421, 10.1143/JJAP.25.L421

Fitzgerald, 1990, J. Electron. Mater., 19, 949, 10.1007/BF02652921

Yacobi, 1986, J. Appl. Phys., 59, R1, 10.1063/1.336491

Chin, 1982, J. Electrochem. Soc., 129, 369, 10.1149/1.2123850

Marek, 1985, J. Electrochem. Soc., 132, 1502, 10.1149/1.2114153

Chin, 1979, Appl. Phys. Letters, 34, 476, 10.1063/1.90840

Horl, 1972, 502

Carlson, 1974, J. Phys. E, 7, 98, 10.1088/0022-3735/7/2/009

Pennycook, 1977, 69

Davidson, 1977, 65

Pfefferkorn, 1980, Scanning Electron Microsc., 1, 251

Davidson, 1980, 351

Hastenrath, 1981, 47

Trigg, 1985, Scanning Electron. Microsc., 3, 1011

Pennycook, 1980, Phil. Mag. A, 41, 589, 10.1080/01418618008239335

Pennycook, 1981, 55

Roberts, 1981, 51

Berger, 1985, 137

Franzosi, 1986, J. Crystal Growth, 75, 521, 10.1016/0022-0248(86)90098-9

Franzosi, 1985, Mater. Letters, 3, 425, 10.1016/0167-577X(85)90132-6

Petroff, 1978, Scanning Electron. Microsc., 1, 325

Petroff, 1980, J. Microsc., 118, 255, 10.1111/j.1365-2818.1980.tb00272.x

Petroff, 1981, Inst. Phys. Conf. Ser. No., 61, 501

Weng, 1989, J. Appl. Phys., 66, 2217, 10.1063/1.344272

Ballingall, 1990, J. Electron. Mater., 19, 509, 10.1007/BF02651271

Elman, 1989, Appl. Phys. Letters, 55, 1659, 10.1063/1.102279

Grundmann, 1990, J. Vacuum Sci. Technol. B, 8, 751, 10.1116/1.585005

Whaley, 1988, J. Vacuum Sci. Technol. B, 6, 625, 10.1116/1.584416

Radulescu, 1989, J. Vacuum Sci. Technol. B, 7, 111, 10.1116/1.584432

Drigo, 1989, J. Appl. Phys., 66, 1975, 10.1063/1.344335

Whaley, 1990, Appl. Phys. Letters, 57, 144, 10.1063/1.103966

Kohama, 1988, Japan. J. Appl. Phys., 26, L1944, 10.1143/JJAP.26.L1944

Kasper, 1975, Thin Solid Films, 44, 357, 10.1016/0040-6090(77)90443-6

Hull, 1988, Appl. Phys. Letters, 52, 1605, 10.1063/1.99055

Eaglesham, 1988, Appl. Phys. Letters, 53, 2083, 10.1063/1.100288

van der Leur, 1988, J. Appl. Phys., 64, 3043, 10.1063/1.341568

Houghton, 1990, J. Appl. Phys., 67, 1850, 10.1063/1.345613

Tuppen, 1989, Thin Solid Films, 183, 133, 10.1016/0040-6090(89)90438-0

Perovic, 1989, Thin Solid Films, 183, 141, 10.1016/0040-6090(89)90439-2

Pindoria, 1990, J. Vacuum Sci. Technol. B, 8, 21, 10.1116/1.584860

Freund, 1989, Mater. Res. Soc. Symp. Proc., 130, 139, 10.1557/PROC-130-139

Fitzgerald, 1988, J. Appl. Phys., 63, 693, 10.1063/1.340059

Fitzgerald, 1988, 173

Eaglesham, 1989, Phys. Rev. Letters, 62, 187, 10.1103/PhysRevLett.62.187

Tuppen, 1990, Appl. Phys. Letters, 56, 54, 10.1063/1.102645

Chang, 1989, J. Appl. Phys., 66, 2993, 10.1063/1.344183

Breen, 1989, J. Vacuum Sci. Technol. B, 7, 758, 10.1116/1.584640

Kroemer, 1989, J. Crystal Growth, 95, 96, 10.1016/0022-0248(89)90359-X

Tachikawa, 1990, Appl. Phys. Letters, 56, 484, 10.1063/1.102773

Ploog, 1986, J. Crystal Growth, 79, 887, 10.1016/0022-0248(86)90569-5

Okamoto, 1987, Japan. J. Appl. Phys., 26, 315, 10.1143/JJAP.26.315

Drummond, 1982, J. Appl. Phys., 53, 1238, 10.1063/1.330537

Fischer, 1984, IEEE Trans. Electron Devices, ED-31, 1028, 10.1109/T-ED.1984.21655

Zipperian, 1983, IEDM Proceedings, 696

Rosenberg, 1985, IEEE Electron Device Letters, EDL-6, 491, 10.1109/EDL.1985.26205

Henderson, 1986, IEEE Electron Device Letters, EDL-7, 649, 10.1109/EDL.1986.26507

Okamoto, 1987, Japan. J. Appl. Phys., 26, 539, 10.1143/JJAP.26.539

Liu, 1987, J. Crystal Growth, 81, 359, 10.1016/0022-0248(87)90417-9

Pearsall, 1986, IEEE Electron Device Letters, EDL-7, 308, 10.1109/EDL.1986.26383

People, 1986, IEEE J. Quantum Electron, QE-22, 1696, 10.1109/JQE.1986.1073152

Sze, 1981, 182

Enquist, 1987, J. Crystal Growth, 81, 378, 10.1016/0022-0248(87)90420-9

Lee, 1986, IEEE Electron Device Letters, EDL-17, 683, 10.1109/EDL.1986.26519

Ramberg, 1987, J. Appl. Phys., 61, 1234, 10.1063/1.338179

Temkin, 1981, J. Appl. Phys., 52, 5377, 10.1063/1.329398

Yamakoshi, 1981, IEEE J. Quantum Electron, QE-17, 167, 10.1109/JQE.1981.1071053

Iyer, 1989, IEEE Trans. Electron Devices, 36, 2043, 10.1109/16.40887

Veda, 1982, J. Appl. Phys., 53, 2991, 10.1063/1.331039

Veda, 1982, J. Appl. Phys., 53, 9170, 10.1063/1.330429

Chin, 1983, Appl. Phys. Letters, 42, 1031, 10.1063/1.93831

Ueda, 1980, J. Appl. Phys., 51, 5316, 10.1063/1.327445

Veda, 1985, J. Appl. Phys., 58, 3996, 10.1063/1.335576

Veda, 1985, J. Appl. Phys., 57, 1523, 10.1063/1.334466

Chu, 1988, J. Appl. Phys., 63, 611, 10.1063/1.340100

Nannichi, 1974, J. Crystal Growth, 27, 126, 10.1016/S0022-0248(74)80056-4

Hiyamizu, 1979, Surface Sci., 86, 137, 10.1016/0039-6028(79)90388-1

Katsumoto, 1985, Japan. J. Appl. Phys., 24, 636, 10.1143/JJAP.24.636

Fang, 1990, J. Appl. Phys., 68, R31, 10.1063/1.346284

Deppe, 1987, Appl. Phys. Letters, 51, 1271, 10.1063/1.98702

Won, 1987, J. Appl. Phys., 62, 3860, 10.1063/1.339230

Yamaguchi, 1986, J. Appl. Phys., 59, 1751, 10.1063/1.336439

Ashizawa, 1988, J. Appl. Phys., 64, 4065, 10.1063/1.341313

Crumbaker, 1989, Appl. Phys. Letters, 54, 140, 10.1063/1.101209

Fitzgerald, 1989, J. Appl. Phys., 65, 2220, 10.1063/1.342834

Fitzgerald, 1988, Appl. Phys. Letters, 52, 1496, 10.1063/1.99110

Fitzgerald, 1990, Mater. Res. Soc. Symp. Proc., 160, 59, 10.1557/PROC-160-59

Rajan, 1987, J. Appl. Phys., 62, 1713, 10.1063/1.339598

Fitzgerald, 1991, Appl. Phys. Letters, 59, 811, 10.1063/1.105351

Dodson, 1988, Appl. Phys. Letters, 53, 37, 10.1063/1.100115