Direct hard X-ray photodetector with superior sensitivity based on ZnGa2O4 epilayer grown by metalorganic chemical vapor deposition

Rouxel, 2018, X-ray sum frequency diffraction for direct imaging of ultrafast electron dynamics, Phys. Rev. Lett., 120, 1, 10.1103/PhysRevLett.120.243902 Tegze, 1996, X-ray holography with atomic resolution, Nature, 380, 49, 10.1038/380049a0 Cole, 2014, Contrast-enhanced X-ray detection of breast microcalcifications in a murine model using targeted gold nanoparticles, ACS Nano, 8, 7486, 10.1021/nn5027802 Shrestha, 2017, High-performance direct conversion X-ray detectors based on sintered hybrid lead triiodide perovskite wafers, Nat. Photonics, 11, 436, 10.1038/nphoton.2017.94 Xu, 2020, High-sensitivity X-ray imaging of a lead halide perovskite single-crystal scintillator, Opt. Lett., 45, 355, 10.1364/OL.45.000355 Kasap, 2011, Amorphous and polycrystalline photoconductors for direct conversion flat panel x-ray image sensors, Sensors, 11, 5112, 10.3390/s110505112 Kasap, 2000, X-ray sensitivity of photoconductors: application to stabilized a-Se, J. Phys. D Appl. Phys., 33, 2853, 10.1088/0022-3727/33/21/326 Li, 2020, Investigation on X-ray photocurrent response of CdZnTe photon counting detectors, Sensors, 20, 1, 10.3390/s20020383 Barbeau, 2007, Large-mass ultralow noise germanium detectors: performance and applications in neutrino and astroparticle physics, J. Cosmol. Astropart. Phys., 9 Girolami, 2012, Diamond detectors for UV and X-ray source imaging, IEEE Electron. Device Lett., 33, 224, 10.1109/LED.2011.2176907 Fang, 2015, Highly narrowband perovskite single-crystal photodetectors enabled by surface-charge recombination, Nat. Photonics, 9, 679, 10.1038/nphoton.2015.156 Chaudhuri, 2014, Large Area Cd0.9 Zn0.1 pixelated detector: fabrication and characterization, IEEE Trans. Nucl. Sci., 61, 793, 10.1109/TNS.2014.2307861 Knoll, 1981, Radiation Detection and Measurement, 69 Wu, 2019, OPEN NO gas sensor based on ZnGa 2 O 4 epilayer grown by metalorganic chemical vapor deposition, Sci. Rep., no. March, 1 Bierwagen, 2015 Zhang, 2021, ε-Ga2O3 thin film avalanche low-energy X-ray detectors for highly sensitive detection and fast-response applications, Adv. Mater. Technol., 6, 1, 10.1002/admt.202001094 Chen, 2021, High-performance X-ray detector based on single-crystal β-Ga2O3:Mg, ACS Appl. Mater. Interfaces, 13, 2879, 10.1021/acsami.0c20574 Liang, 2019, Flexible X-ray detectors based on amorphous Ga 2 O 3 thin films, ACS Photonics, 6, 351, 10.1021/acsphotonics.8b00769 Chen, 2021, “ Highly sensitive X-ray detector based on a β-Ga 2 O 3 :Fe single crystal ,”, Opt Express, 29, 10.1364/OE.435366 Chen, 2020, Zinc gallium oxide—a review from synthesis to applications, Nanomaterials, 10, 1, 10.3390/nano10112208 Khan, 2022, Investigating mechanical properties of sintered ZnGa2O4 ceramics using nanoindentation, Ceram. Int., 48, 27064, 10.1016/j.ceramint.2022.06.018 Tsai, 2018, Deep-ultraviolet photodetectors based on epitaxial ZnGa2O4 thin films, Sci. Rep., 8, 1, 10.1038/s41598-018-32412-3 Lin, 2021, ZnGa2O4 deep-ultraviolet photodetector based on Si substrate, Mater. Lett., 283, 10.1016/j.matlet.2020.128805 Horng, 2021, Reliability study on deep-ultraviolet photodetectors based on ZnGa2O4 epilayers grown by MOCVD, Appl. Surf. Sci., 555, 10.1016/j.apsusc.2021.149657 Horng, 2022, Effects of UV-ozone treatment on the performance of deep-ultraviolet photodetectors based on ZnGa2O4 epilayers, Mater. Chem. Phys., 292 Sood, 2021, Performance enhancement of ZnGa2O4 Schottky type deep-ultraviolet photodetectors by oxygen supercritical fluid treatment, Results Phys., 29, 10.1016/j.rinp.2021.104764 Horng, 2022, Growth mechanism and characteristics of β-Ga2O3 heteroepitaxailly grown on sapphire by metalorganic chemical vapor deposition, Mater. Today Adv., 16 Seiler, 2015, Epitaxial growth of gallium oxide films on c-cut sapphire substrate, Thin Solid Films, 589, 556, 10.1016/j.tsf.2015.06.034 Averine, 2000, Evaluation of Schottky contact parameters in metal-semiconductor-metal photodiode structures, Appl. Phys. Lett., 77, 274, 10.1063/1.126948 Dixit, 2011, Electronic structure and band gap of zinc spinel oxides beyond LDA: ZnAl2O4, ZnGa2O4 and ZnIn 2O4, New J. Phys., 13, 10.1088/1367-2630/13/6/063002 Girolami, 2023, “ Orthorhombic undoped κ-Ga 2 O 3 epitaxial thin films for sensitive, fast, and stable direct X-ray detectors ,”, J. Mater. Chem. C, 11, 3759, 10.1039/D2TC05297K Duboz, 2009, Anomalous photoresponse of GaN x-ray Schottky detectors, J. Appl. Phys., 105, 10.1063/1.3141818 Li, 2020, High performance broadband photo and soft X-ray detectors based on two dimensional CrSiTe3, J. Mater. Chem. C, 8, 6659, 10.1039/D0TC01354D Fowler, 1966, Attix, “Solid state electrical conductivity dosimeters,” Zhang, 2019, 1 Wei, 2017, Monolithic integration of hybrid perovskite single crystals with heterogenous substrate for highly sensitive X-ray imaging, Nat. Photonics, 11, 315, 10.1038/nphoton.2017.43 Yakunin, 2015, Detection of X-ray photons by solution-processed lead halide perovskites, Nat. Photonics, 9, 444, 10.1038/nphoton.2015.82 Su, 2005, Systematic investigation of the signal properties of polycrystalline HgI2 detectors under mammographic, radiographic, fluoroscopic and radiotherapy irradiation conditions, Phys. Med. Biol., 50, 2907, 10.1088/0031-9155/50/12/012 Zhang, 2020, Sensitive and fast direct conversion X-ray detectors based on single-crystalline HgI2 photoconductor and ZnO nanowire vacuum diode, Adv. Mater. Technol., 5, 1 Zhang, 2020, Nucleation-controlled growth of superior lead-free perovskite Cs3Bi2I9 single-crystals for high-performance X-ray detection, Nat. Commun., 11, 1 Liang, 2019, Flexible X-ray detectors based on amorphous Ga 2 O 3 thin films, ACS Photonics, 6, 351, 10.1021/acsphotonics.8b00769 Payne, 1992, Iterative minimization techniques for ab initio total-energy calculations: molecular dynamics and conjugate gradients, Rev. Mod. Phys., 64, 1045, 10.1103/RevModPhys.64.1045 V Akhmatskaya, 1999, Phase stability of inorganic crystals : a pseudopotential plane-wave study, Int. J. Quant. Chem., 77, 895 Perdew, 1996, Generalized gradient approximation made simple, Phys. Rev. Lett., 77, 3865, 10.1103/PhysRevLett.77.3865 Dong, 2017, Ab initio study of N-doped β-Ga2O3 with intrinsic defects: the structural, electronic and optical properties, J. Alloys Compd., 712, 379, 10.1016/j.jallcom.2017.04.020 Brik, 2010, First-principles calculations of electronic, optical and elastic properties of ZnAl2S4 and ZnGa2O4, J. Phys. Chem. Solid., 71, 1435, 10.1016/j.jpcs.2010.07.007