B.D. Cullity, Elements of X-ray diffractions (Addison-Wesley, Massachusetts, 1978)
K.N. Stoev, K. Sakurai, Spectrochim. Acta B 54, 41 (1999)
T.C. Huang, Adv. X-ray Anal. 33, 91 (1990)
T. Noma, K. Takada, A. Iida, Adv. X-ray Anal. 42, 578 (2000)
H. Wu, B. Li, W. Miao, X. Liu, K. Tao, Surf. Coat. Tech. 149, 198 (2002)
T.C. Huang, P.K. Predecki, Adv. X-ray Anal. 40, 727 (1996)
L Lhotka, R. Kužel, G. Cappuccino, V. Valvoda, Surf. Coat. Tech. 148, 96 (2001)
B. Kucharska, E. Kulej, Arch. Metall. Mater. 55, 45 (2010)
K. Tanner, T.P.A. Hase, T.A. Lafforf, M.S. Goorsky, Adv. X-ray Anal. 47, 309 (2004)
K. Omote, J. Harada, Adv. X-ray Anal. 43, 192 (2000)
Committe on Beam Technologies: Opportunities in Attanding Fully-Integrated Processing Systems, Commission on Engineering and Technical Systems, National Research Council, National Academies Press, Washington, D.C. 1992
H. Geng, Semiconductor Manufacturing Handbook (McGraw-Hill Prof. Publ., Blacklick, OH, USA, 2005)
A. Anders, Thin Solid Films 518, 4087 (2010)
J.A. Thornton, Thin Solid Films 107, 3 (1983)
R. Messier, A.P. Giri, R.A. Roy, J. Vac. Sci. Technol. A 2, 500 (1984)
A.D. Pogrebnjak, A.P. Shpak, N.A. Azarenkov, V.M. Beresnev, Phys.-Usp. 52, 29 (2009)
J. Musil, Surf. Coat. Tech. 100–101, 280 (1998)
A.D. Pogrebnjak, A.P. Shpak, N.A. Azarenkov, V.M. Beresnev, Phys.-Usp. 175, 35 (2009)
B. Window, N. Savvides, J. Vac. Sci. Technol. A 4, 504 (1986)
R. Messier, J. Vac. Sci. Technol. A 18, 1538 (2000)
M.J. Godbole, A.J. Pedraza, L.F. Allard, G. Geesey, J. Mater. Sci. 27, 5585 (1992)
P.J. Grundy, J.M. Marsh, J. Mater. Sci. Lett. 13, 677 (1978)
R.I. Bates, R.D. Arnell, Surf. Coat. Tech. 89, 204 (1997)
S. Cusenza, C. Borchers, E. Carpene, P. Schaaf, J. Phys.-Condens. Mat. 19, 106211 (2007)
K.L Dahm, P.A. Dearnley, Surf. Eng. 12, 61 (1996)
S. Inoue, T. Saeki, H. Uchida, K. Koterazawa, M. Iwasa, Vacuum 66, 257 (2002)
A.A. Levin et al., J. Alloy. Compd. 347, 171 (2002)
Z. Liu, G. Wang, W. Gao, Mater. Charact. 54, 466 (2005)
N. Merakeb, J.-P. Eymery, A. Finidiki, Ph. Goudeau, B. Bouzabata, Mater. Sci. 58, 711 (2004)
X. Zhang et al., J. Mater. Res. 19, 1696 (2004)
B. Kucharska, Mater. Sci.-Poland 26, 181 (2008)
A.D. Pogrebnjak et al., Vacuum 81, 1243 (2007)
M. Danielewski, B. Wierzba, Acta Mater. 58, 6717 (2010)
B. Kucharska, Sol. St. Phen. 163, 247 (2010)
S. Bac et al., J. X-ray Sci. Technol. 5, 161 (1995)