Diffractive phase element for shrinking focal spot diameter: Design, fabrication, and application to laser beam lithography

Yusuke Ogura1, Jun Tanida1, Yoshiki Ichioka2, Yoshiaki Mokuno3, K. Matsuoka3
1Department of Material and Life Science, Graduate School of Engineering, Osaka University, Suita, Osaka, Japan
2Nara National College of Technology, Yamatokoriyama, Nara, Japan
3Osaka National Research Institute, Ikeda, Osaka, Japan

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