Determining mean and gradient residual stresses in thin films using micromachined cantilevers

Lin S C H, 1972, J. Appl. Phys., 43

10.1016/0924-4247(92)80154-U

10.1109/16.216428

Ding X, 1990, Sensors and Actuators, 21, 866, 10.1016/0924-4247(90)87048-N

Campbell J D S, 1970

10.1016/0040-6090(89)90030-8

10.1063/1.334435

Fang W, 1994, J. Micromech. Microeng., 4, 116, 10.1088/0960-1317/4/3/004

Guckel H, 1992, J. Micromech. Microeng., 2, 86, 10.1088/0960-1317/2/2/004

10.1063/1.339285

10.1116/1.576514

Howe R T, 1983, J. Electrochem. Soc., 130

Meng Q, 1993, J. Microelectromechanical System, 2

Runyan W R, 1990

Timoshenko S, 1959

Kobeda E, 1988, J. of Vac. Sci. Technol. B, 6, 10.1116/1.584402

Johansson S, 1989, J. of Appl. Phys., 65, 10.1063/1.342585

Petersen K E, 1979, Journal of Applied Physics, 50

Mastrangelo C H, 1993, J. Microelectromechanical System, 2

Fatah R M A, 1992, Sensors and Actuators A, 33