Determination of the ionization gauge sensitivity using the relative ionization cross-section

Vacuum - Tập 25 Số 9-10 - Trang 431-435 - 1975
Fusafumi Nakao1
1Central Research Laboratory, Matsushita Electric Industrial Co, Ltd, 1006 Kadoma, Osaka, 571 Japan

Tóm tắt

Từ khóa


Tài liệu tham khảo

Dushman, 1945, Phys. Rev., 68, 278, 10.1103/PhysRev.68.278.2

Wagener, 1951, J Scient Instrum, 28, 278, 10.1088/0950-7671/28/9/306

Schulz, 1957, J Appl Phys, 28, 1149, 10.1063/1.1722595

Anderson, 1963, Rev Scient Instrum, 34, 703, 10.1063/1.1718551

1965, Varian Publication No 87-400-074

Rothe, 1964, J Vac Sci Technol, 1, 66, 10.1116/1.1491727

Utterbach, 1966, Rev Scient Instrum, 37, 866, 10.1063/1.1720349

Moesta, 1957, Vakuum-Technik, 6, 35

Morgulis, 1934, Z Physik, 5, 407

Young, 1973, J Vac Sci Technol, 10, 212, 10.1116/1.1317943

Nakayama, 1974

Riddiford, 1951, J Sci Instrum, 28, 375, 10.1088/0950-7671/28/12/307

Schwarz, 1944, Z Physik, 122, 437, 10.1007/BF01342765

Metson, 1951, Br J Appl Phys, 2, 46, 10.1088/0508-3443/2/2/304

Tominaga, 1950, J Vac Soc Jap, 1, 27

Tominaga, 1955, J Vac Soc Jap, 2, 19

Found, 1924, Phys. Rev, 23, 734, 10.1103/PhysRev.23.734

Oda, 1957, J Vac Soc Jap, 7, 197

Ishii, 1960, J Vac Soc Jap, 3, 77

Langmuir, 1928, Phys Rev, 31, 357, 10.1103/PhysRev.31.357

Redhead, 1969, J Vac Sci Technol, 6, 848, 10.1116/1.1492719

Alpert, 1953, J Appl Phys, 24, 7, 10.1063/1.1721395

Lampe, 1957, J Am Chem Soc, 79, 6129, 10.1021/ja01580a007

Otvos, 1956, J Chem Soc, 78, 546, 10.1021/ja01584a009

Massey, 1952, Electronic and Ionic Impact Phenomena, 31

Massey, 1952, Electronic and Ionic Impact Phenomena, 38

Massey, 1952, Electronic and Ionic Impact Phenomena, 265

Tate, 1932, Phys Rev, 39, 270, 10.1103/PhysRev.39.270

Rapp, 1965, J Chem Phys, 43, 1464, 10.1063/1.1696957

Smith, 1931, Phys Rev, 37, 808, 10.1103/PhysRev.37.808

Asundi, 1963, Electron Control, 15, 41, 10.1080/00207216308937549

Mohler, 1950, J Res Natl Bur Standards, 45, 235, 10.6028/jres.045.023

Nakao, 1975, Vacuum, 25, 201, 10.1016/0042-207X(75)91860-6

Reich, 1957, Z Angew Physik, 9, 23