Design of free-standing GaN strip waveguide and grating couplers

Optik - Tập 127 - Trang 7726-7731 - 2016
Qifa Liu1, Zhenhai Wang1, Wei Wang1, Shumin He1
1College of Telecommunication and Information Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China

Tài liệu tham khảo

Cimalla, 2007, Group III nitride and SiC based MEMS and NEMS: materials properties technology and applications, J. Phys. D: Appl. Phys., 40, 6386, 10.1088/0022-3727/40/20/S19 Rosenberg, 2005, Guided resonances in asymmetrical GaN photonic crystal slabs observed in the visible spectrum, Opt. Express, 13, 6564, 10.1364/OPEX.13.006564 Meier, 2006, Visible resonant modes in GaN-based photonic crystal membrane cavities, Appl. Phys. Lett., 88, 031111, 10.1063/1.2166680 Davies, 2004, Fabrication of GaN cantilevers on silicon substrates for microelectromechanical devices, Appl. Phys. Lett., 84, 2566, 10.1063/1.1695196 Yang, 2006, Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique, Appl. Phys. Lett., 88, 041913, 10.1063/1.2167813 Shakya, 2004, Near-field optical study of AlGaN/GaN quantum-well waveguide, Appl. Phys. Lett., 84, 1832, 10.1063/1.1675936 Xing, 2006, Analysis of GaN-based single-mode rib waveguide with large cross section, J. Microlith. Microfab., 5, 033009 Liu, 2015, Freestanding GaN grating couplers at visible wavelengths, J. Opt., 17, 045607, 10.1088/2040-8978/17/4/045607 Sameshima, 2009, A freestanding GaN/HfO2 membrane grown by molecular beam epitaxy for GaN–Si hybrid MEMS, IEEE J. Sel. Top. Quant., 15, 1332, 10.1109/JSTQE.2009.2017031 Sameshima, 2011, A GaN electromechanical tunable grating on Si substrate, IEEE Photon. Technol. Lett., 23, 281 Yang, 2005, GaN-on-patterned-silicon (GPS) technique for fabrication of GaN-based MEMS, Proc. Transducers, 05, 887 Wang, 2010, Fabrication and characterization of freestanding circular GaN gratings, Opt. Express, 18, 773, 10.1364/OE.18.000773 Wang, 2014, Circular GaN membrane gratings, IEEE Photon. Technol. Lett., 26, 915, 10.1109/LPT.2014.2310211 Vico Trivino, 2013, Integrated photonics on silicon with wide bandgap GaN semiconductor, Appl. Phys. Lett., 102, 081120, 10.1063/1.4793759 Ryu, 2001, Over 30-fold enhancement of light extraction from freestanding photonic crystal slabs with InGaAs quantum dots at low temperature, Appl. Phys. Lett., 79, 3573, 10.1063/1.1420405 Boutami, 2006, Highly selective and compact tunable MOEMS photonic crystal Fabry-Perot filter, Opt. Express, 14, 3129, 10.1364/OE.14.003129 Arita, 2007, AlN air-bridge photonic crystal nanocavities demonstrating high quality factor, Appl. Phys. Lett., 91, 051106, 10.1063/1.2757596 Watts, 2007, Optical resonators: microphotonic thermal imaging, Nat. Photonics, 1, 632, 10.1038/nphoton.2007.219 Lee, 2001, Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction, Opt. Lett., 26, 1888, 10.1364/OL.26.001888 Grillot, 2004, Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides, IEEE Photon. Technol. Lett., 16, 1661, 10.1109/LPT.2004.828497 Bogaerts, 2007, Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides, Opt. Lett., 32, 2801, 10.1364/OL.32.002801 Fukazawa, 2004, Low loss intersection of Si photonic wire waveguides, Jpn. J. Appl. Phys., 43, 646, 10.1143/JJAP.43.646 Zhu, 2012, Novel high efficiency vertical to in-plane optical coupler, Proc. SPIE, 8270, 82700L, 10.1117/12.909414 Taillaert, 2006, Grating couplers for coupling between optical fibers and nanophotonic waveguides, Jpn. J. Appl. Phys., 45, 6071, 10.1143/JJAP.45.6071 Chen, 2012, Design and applications of silicon waveguide grating couplers, Proc. SPIE, 8266, 82660I, 10.1117/12.907947 Huang, 2007, A surface-emitting laser incorporating a high-index-contrast subwavelength grating, Nat. Photonics, 1, 119, 10.1038/nphoton.2006.80 Hill, 1997, Fiber Bragg grating technology fundamentals and overview, J. Lightwave Technol., 15, 1263, 10.1109/50.618320 Taillaert, 2004, Compact efficient broadband grating coupler for silicon-on-insulator waveguides, Opt. Lett., 29, 2749, 10.1364/OL.29.002749 Yonenaga, 2001, Yield strength and dislocation mobility in plastically deformed bulk single-crystal GaN, J. Appl. Phys., 90, 6539, 10.1063/1.1415754 Yonenaga, 2005, Hardness, yield strength, and dislocation velocity in elemental and compound semiconductors, Mater. Trans., 46, 1979, 10.2320/matertrans.46.1979